Cathodic arc deposition of (Al,Cr)2O3: Macroparticles and cathode surface modifications

Surface and Coatings Technology

Volumn 206, Issue 6, 2011, Pages 1454-1460

  Pohler, M ^a   Franz, R ^a   Ramm, J ^b   Polcik, P ^c   Mitterer, C ^a  

^a UNIVERSITY OF LEOBEN   (Austria)

^b Balzers AG   (Liechtenstein)

^c PLANSEE COMPOSITE MATERIALS GMBH   (Germany)

Author keywords

(Al,Cr)2O3; Arc evaporation; Compound cathode; Macroparticle; Solid solution

Indexed keywords

(AL,CR)2O3; ARC EVAPORATION; CATHODE MATERIALS; CATHODE SURFACE; CATHODIC ARC DEPOSITION; CHEMICAL COMPOSITIONS; COMPOUND CATHODE; EVAPORATION PROCESS; MACRO-PARTICLES; MACROPARTICLE; REACTION LAYERS; SCANNING AND TRANSMISSION ELECTRON MICROSCOPY;

CATHODES; CHEMICAL ANALYSIS; CHROMATE COATINGS; CHROMIUM; EVAPORATION; PHASE TRANSITIONS; SCANNING ELECTRON MICROSCOPY; SURFACES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ALUMINUM;

EID: 80055106121     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.09.028     Document Type: Article

References (35)

1. Tay B.K., Zhao Z.W., Chua D.H.C. Mat. Sci. Eng. R 2006, 52:1.
2. Ramm J., Ante M., Bachmann T., Widrig B., Brändle H., Döbeli M. Surf. Coat. Technol. 2007, 202:876.
3. Ashenford D.E., Long F., Hagston W.E., Lunn B., Matthews A. Surf. Coat. Technol. 1999, 116-119:699.
4. Witthaut M., Cremer R., Reichert K., Neuschütz D. Mikrochim. Acta 2000, 133:191.
5. Diechle D., Stueber M., Leiste H., Ulrich S., Schier V. Surf. Coat. Technol. 2010, 204:3258.
6. Pedersen K., Bøttiger J., Sridharan M., Sillassen M., Eklund P. Thin Solid Films 2010, 518:4294.
7. Ramm J., Ante M., Brändle H., Neels A., Dommann A., Döbeli M. Adv. Eng. Mater. 2007, 9:604.
8. Levchuk D., Bolt H., Döbeli M., Eggenberger S., Widrig B., Ramm J. Surf. Coat. Technol. 2008, 202:5043.
9. Khatibi A., Palisaitis J., Höglund C., Eriksson A., Persson P.O.Å., Jensen J., Birch J., Eklund P., Hultman L. Thin Solid Films 2011, 519:2426.
10. Sitte W. Mater. Sci. Monog. 1985, 28A:451.
11. Boxman R.L., Goldsmith S. Surf. Coat. Technol. 1992, 52:39.
12. Hörling A., Hultman L., Odén M., Sjölén J., Karlsson L., Vac J. Sci. Technol. A 2002, 20:1815.
13. Harlin P., Bexell U., Olsson M. Surf. Coat. Technol. 2009, 203:1748.
14. Ljungcrantz H., Hultman L., Sundgren J.E., Håkansson G., Karlsson L. Surf. Coat. Technol. 1994, 63:123.
15. Rafaja D., Merkewitz T., Polzer C., Klemm V., Schreiber G., Polcik P., Kathrein M. Proc. 17th Plansee Seminar Vol. 2: P/M Hard Materials 2009, Plansee Group, Reutte, HM 38/1-12. L.S. Sigl, P. Rödhammer, H. Wildner (Eds.).
16. Zhu J.Q., Eriksson A., Ghafoor N., Johansson M.P., Sjölén J., Hultman L., Rosén J., Odén M., Vac J. Sci. Technol. A 2010, 28:347.
17. Kühn M., Richter F. Surf. Coat. Technol. 1997, 89:16.
18. Harris S.G., Doyle E.D., Wong Y.-C., Munroe P.R., Cairney J.M., Long J.M. Surf. Coat. Technol. 2004, 183:283.
19. Li M., Wang F. Surf. Coat. Technol. 2003, 167:197.
20. Ramm J., Neels A., Widrig B., Döbeli M., de Abreu Vieira L., Dommann A., Rudigier H. Surf. Coat. Technol. 2010, 205:1356.
21. Powder Diffraction File (Card 00-004-0787 for Al, Card 00-006-0694 for Cr, Card 00-046-1212 for α-Al2O3, Card 00-029-0015 for Al8Cr5, Card 00-040-1242 for Al4Cr), International Centre for Diffraction Data, ICDD - JCPDS, 2007.
22. Hörling A., Hultman L., Odén M., Sjölén J., Karlsson L. Surf. Coat. Technol. 2005, 191:384.
23. Franz R., Lechthaler M., Polzer C., Mitterer C. Surf. Coat. Technol. 2010, 204:2447.
24. Willmann H., Mayrhofer P.H., Hultman L., Mitterer C. J. Mater. Res. 2008, 23:2880.
25. Anders A. Cathodic Arcs 2008, Springer, New York. 1st edition.
26. Petrov I., Losbichler P., Bergstrom D., Greene J.E., Münz W.-D., Hurkmans T., Trinh T. Thin Solid Films 1997, 302:179.
27. Neidhardt J., O'Sullivan M., Reiter A.E., Rechberger W., Grogger W., Mitterer C. Surf. Coat. Technol. 2006, 201:2553.
28. de Abreu Vieira L., Döbeli M., Dommann A., Kalchbrenner E., Neels A., Ramm J., Rudigier H., Thomas J., Widrig B. Surf. Coat. Technol. 2010, 204:1722.
29. Münz W.-D., Lewis D.B., Creasey S., Hurkmans T., Trinh T., Ijzendorn W. Vacuum 1995, 46:323.
30. Anders S., Anders A., Yu K.M., Yao X.Y., Brown I.G. IEEE Trans. Plasma Sci. 1993, 21:440.
31. Mahdouk K., Gachon J.C. J. Phase. Equil. 2000, 21:157.
32. Lu J., Szpunar J.A. Scr. Metall. Mater. 1995, 32:1957.
33. Handwerker C.A., Foecke T.J., Wallace J.S., Kattner U.R., Jiggets R.D. Mater. Sci. Eng., A 1995, 195:89.
34. Li X.Z., Sugiyama K., Hiraga K., Sato A., Yamamoto A., Sui H.X., Kuo K.H. Z. Kristallogr. 1997, 212:628.
35. Cao B.B., Kuo K.H., Alloys J. Compd. 2008, 458:238.