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Volumn 89, Issue 1-2, 1997, Pages 16-23
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Characteristics in reactive arc evaporation
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Author keywords
Model; Reactive arc evaporation
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Indexed keywords
CHROMIUM;
COMPOSITION EFFECTS;
EVAPORATION;
FILMS;
MATHEMATICAL MODELS;
NITROGEN;
PRESSURE EFFECTS;
STOICHIOMETRY;
SUBSTRATES;
SURFACES;
TITANIUM;
ZIRCONIUM;
CATHODE EROSION RATE;
REACTIVE ARC EVAPORATION;
REACTIVE GAS FLOW;
CATHODES;
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EID: 17144447035
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/s0257-8972(96)02929-5 Document Type: Article |
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Times cited : (19)
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References (5)
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