Structure, mechanical properties and oxidation behaviour of arc-evaporated NbAlN hard coatings

Surface and Coatings Technology

Volumn 204, Issue 15, 2010, Pages 2447-2453

  Franz, R ^a   Lechthaler, M ^b   Polzer, C ^c   Mitterer, C ^a  

^a UNIVERSITY OF LEOBEN   (Austria)

^b Balzers AG   (Liechtenstein)

^c PLANSEE COMPOSITE MATERIALS GMBH   (Germany)

Author keywords

Arc evaporation; Hard coatings; Mechanical properties; NbAlN; Oxidation resistance

Indexed keywords

AL CONTENT; AL-CONCENTRATION; ALN; AMBIENT AIR; ANNEALING EXPERIMENTS; ARC-EVAPORATION; BIAXIAL STRESS; CATHODIC ARC; CUBIC STRUCTURE; DEPOSITION PARAMETERS; FACE-CENTERED CUBIC STRUCTURE; MAXIMUM VALUES; ONSET TEMPERATURE; OXIDATION BEHAVIOURS; STRUCTURAL INVESTIGATION; WURTZITE STRUCTURE;

ALUMINUM; CAVITY RESONATORS; CRYSTAL STRUCTURE; EVAPORATION; INORGANIC COATINGS; MECHANICAL PROPERTIES; OXIDATION; OXIDATION RESISTANCE; STRESSES; STRUCTURAL PROPERTIES; TEMPERATURE MEASUREMENT; VAPORS; X RAY DIFFRACTION ANALYSIS; ZINC SULFIDE;

HARD COATINGS;

EID: 77649337183     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.01.023     Document Type: Article

References (35)

1. Münz W.-D. J. Vac. Sci. Technol. A 4 (1986) 2717
2. Zhou M., Makino Y., Nose M., and Nogi K. Thin Solid Films 339 (1999) 203
3. Ide Y., Nakamura T., Kishitake K., Mishra B., and Yamauchi C. Proceedings of the Second International Conference on Processing Materials for Properties (2000) 291
4. PalDey S., and Deevi S.C. Mater. Sci. Eng. A 342 (2003) 58
5. Kawate M., Hashimoto A.K., and Suzuki T. Surf. Coat. Technol. 165 (2003) 163
6. Banakh O., Schmid P.E., Sanjinés R., and Lévy F. Surf. Coat. Technol. 163/164 (2003) 57
7. Reiter A.E., Derflinger V.H., Hanselmann B., Bachmann T., and Sartory B. Surf. Coat. Technol. 200 (2005) 2114
8. Sugishima A., Kajioka H., and Makino Y. Surf. Coat. Technol. 97 (1997) 590
9. Makino Y. ISIJ Int. 38 (1998) 925
10. Kimura A., Kawate M., Hasegawa H., and Suzuki T. Surf. Coat. Technol. 169-170 (2003) 367
11. McIntyre D., Greene J., Håkansson G., Sundgren J.-E., and Münz W.-D. J. Appl. Phys. 67 (1990) 1542
12. Fontalvo G.A., Terziyska V., and Mitterer C. Surf. Coat. Technol. 202 (2007) 1017
13. ASM Handbook, Alloy Phase Diagrams. American Society for Metals Vol. 3 (1992)
14. Zhitomirsky V.N., Grimberg I., Rapoport L., Travitzky N.A., Boxman R.L., Goldsmith S., Raihel A., Lapsker I., and Weiss B.Z. Thin Solid Films 326 (1998) 134
15. Benkahoul M., Martinez E., Karimi A., Sanjinés R., and Lévy F. Surf. Coat. Technol. 180-181 (2004) 178
16. Sandu C.S., Benkahoul M., Parlinska-Wojtan M., Sanjinés R., and Lévy F. Surf. Coat. Technol. 200 (2006) 6544
17. Cansever N., Dani{dotless}şman M., and Kazmanli{dotless} K. Surf. Coat. Technol. 202 (2008) 5919
18. Selinder T.I., Miller D.J., Gray K.E., Sardela Jr. M.R., and Hultman L. Vacuum 46 (1995) 1401
19. D. Holec, R. Franz, C. Mitterer, P.H. Mayrhofer, J. Phys. D: Appl. Phys. in press.
20. Barshilia H.C., Deepthi B., Rajam K.S., Bhatti K.P., and Chaudhary S. J. Mater. Res. 23 (2008) 1258
21. Oliver W.C., and Pharr G.M. J. Mater. Res. 7 (1992) 1564
22. Mayrhofer P.H., and Mitterer C. Surf. Coat. Technol. 133-134 (2000) 131
23. Neidhardt J., Czigány Z., Sartory B., Tessadri R., O'Sullivan M., and Mitterer C. Acta Mater. 54 (2006) 4193
24. Powder Diffraction File 01-071-0162, International Center for Diffraction Data, PDF-2/Release 2005 (2005)
25. Powder Diffraction File 03-065-0841, International Center for Diffraction Data, PDF-2/Release 2005 (2005)
26. Powder Diffraction File 03-065-3409, International Center for Diffraction Data, PDF-2/Release 2005 (2005)
27. Powder Diffraction File 00-035-0789, International Center for Diffraction Data, PDF-2/Release 2005 (2005)
28. R. Daniel, K.J. Martinschitz, J. Keckes, C. Mitterer, Acta Mater. in press, doi:10.1016/j.actamat.2009.12.048.
29. Köstenbauer H., Fontalvo G.A., Kapp M., Keckes J., and Mitterer C. Surf. Coat. Technol 201 (2007) 4777
30. Powder Diffraction File 01-071-0005, International Center for Diffraction Data, PDF-2/Release 2005 (2005)
31. Powder Diffraction File 01-071-0336, International Center for Diffraction Data, PDF-2/Release 2005 (2005)
32. Powder Diffraction File 01-073-6074, International Center for Diffraction Data, PDF-2/Release 2005 (2005)
33. Jehng J.-M., and Wachs I.E. Chem. Mater. 3 (1991) 100
34. Huang B.X., Wang K., Church J.S., and Li Y.-S. Electrochim. Acta 44 (1999) 2571
35. Franz R., Neidhardt J., Sartory B., Tessadri R., and Mitterer C. Thin Solid Films 516 (2008) 6151