Correlation between target surface and layer nucleation in the synthesis of Al-Cr-O coatings deposited by reactive cathodic arc evaporation

Surface and Coatings Technology

Volumn 205, Issue 5, 2010, Pages 1356-1361

  Ramm, Jürgen ^a   Neels, Antonia ^b   Widrig, Beno ^a   Döbeli, Max ^c   Vieira, Leandro de Abreu ^b   Dommann, Alex ^b   Rudigier, Helmut ^a  

^a Balzers AG   (Liechtenstein)

^b CSEM   (Switzerland)

^c ETH ZURICH   (Switzerland)

Author keywords

Arc evaporation; Cohesive energy; Intermetallics; Nucleation; Phase diagram; Target; Ternary oxide

Indexed keywords

ARC CURRENT; ARC EVAPORATION; CATHODIC ARC; CATHODIC ARC EVAPORATION; COHESIVE ENERGIES; CROSS-SECTIONAL SCANNING ELECTRON MICROSCOPIES; DEPOSITION PARAMETERS; INTERMETALLIC PHASIS; OXIDE ISLANDS; OXYGEN PRESSURE; PHASE FORMATIONS; PULSED ARC; PULSED OPERATION; SPECIFIC NUCLEATION; TARGET COMPOSITION; TARGET SURFACE; TERNARY OXIDES;

ALUMINUM; CHROMATE COATINGS; CHROMIUM; EVAPORATION; NUCLEATION; OXYGEN; PHASE DIAGRAMS; PROTECTIVE COATINGS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SOLID SOLUTIONS; SOLIDIFICATION; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

INTERMETALLICS;

EID: 78650013502     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.08.152     Document Type: Article

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