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Volumn 150, Issue 1, 2012, Pages 64-75

Hydrophobic mesostructured organosilica-based thin films with tunable mesopore ordering

Author keywords

Isolated mesopores; Low k; Mesostructured organosilica films; Nanomaterials; Sol gel

Indexed keywords

ELLIPSOMETRIC POROSIMETRY; EVAPORATION-INDUCED SELF-ASSEMBLY; FILM POROSITY; FTIR; HYDROPHILIC-LIPOPHILIC BALANCE; LOW K; MAGIC ANGLE SPINNING NUCLEAR MAGNETIC RESONANCE; MESO-PORES; MESOPORE; MESOPOROSITY; MESOSTRUCTURAL ORDERING; MESOSTRUCTURE ORDERING; MESOSTRUCTURED; MESOSTRUCTURES; METHYLTRIETHOXYSILANE; ORGANOSILICAS; POROGENS; SPACE GROUPS; SPIN-ON; STRUCTURE DIRECTING AGENTS; ULTRA LOW-K; WEIGHT RATIOS;

EID: 80054985251     PISSN: 13871811     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micromeso.2011.09.007     Document Type: Article
Times cited : (11)

References (66)
  • 10
    • 27544506545 scopus 로고    scopus 로고
    • E.M. Freer Nano. Lett. 5 10 2005 2014 2018
    • (2005) Nano. Lett. , vol.5 , Issue.10 , pp. 2014-2018
    • Freer, E.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.