Controlling dielectric and optical properties of ordered mesoporous organosilicate films

Advanced Materials

Volumn 15, Issue 2, 2003, Pages 139-143

  Balkenende, A Ruud ^a   De Theije, Femke K ^a   Kriege, J C Koen ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIELECTRIC PROPERTIES; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROPHOBICITY; POROSITY; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SOL-GELS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

ORGANOSILICATE FILMS;

MESOPOROUS MATERIALS;

EID: 0037448729     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.200390028     Document Type: Article

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