The influence of methyl group content on tribological properties of organo-silica thin films

Tribology Letters

Volumn 14, Issue 3, 2003, Pages 181-185

  Celichowski, G ^a   Piwonski, I ^a   Cichomski, M ^a   Koralewski, K ^a   Plaza, S ^a   Olejniczak, W ^a   Grobelny, J ^a  

^a UNIVERSITY OF LODZ   (Poland)

Author keywords

AFM; Friction; FTIR; Modified silica; Silica; Sol gel

Indexed keywords

SOL-GEL PROCESS;

EID: 1542361888     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1022316430385     Document Type: Article

References (20)

1. M. Mehregany and Y.C. Tai, J. Micromech. Microeng. 1 (1991) 73.
2. M. Mehregany, Circuits and Devices, July (1993) 14.
3. J. Bryzek, K. Peterson and W. McCulley, IEEE Spectrum, May (1994) 20.
4. H. Ogura, S. Maeda, K. Nakamura, U. Sangawa, N. Azuma, S. Aoki, Y. Kawauchi and T. Sato, IEEE Proc. MEMS, (1994) 114.
5. V.V. Tsukruk, Molecular Lubricants and Glues for Micro- and Nanodevices, Adv. Mat. 13 (2001) 95.
6. W. J. van Ooij and T. Child, Chemtech (02.1998) 26.
7. I. Luzinov, D. Julthongpiput, A. Liebmann-Vinson, M.D. Foster and V.V. Tsukruk, Langmuir, 16 (2000) 504.
8. J.H. Fendler, Nanopartides and Nanostructured Films (Wiley-VCH, 1998).
9. C.J. Brinker and G.W. Scherer, Sol-Gel Science (Academic Press, New York, 1990).
10. Modern Tribology Handbook, ed. B. Bhushan, Vol. I, II.
11. G. Binning, C. F. Quate and C. Gerber, Phys. Rev. Lett. 56 (1986) 930.
12. E. Liu, B. Blanpain and J.P. Celis, Wear 192 (1996) 141.
13. G. Mayer and N.M. Amer, Appl. Phys. Lett. 57 (1990) 2089.
14. B. Bhushan and V.N. Koinkar, Sensors and Actuators A, 57 (1996) 91.
15. L.G. Jacobsohn and F.L. Freire Jr., Nuc. Instr. Meth. Phys. Res. B, 175-177 (2001) 442.
16. E. Riedo, J. Chevrier, F. Comin and H. Brune, Surface Science 477 (2001) 25.
17. E. Liu, B. Blanpain, J.P. Celis and J.R. Roos, J. Appl. Phys. 84 (1998) 4859.
18. R.A. Simao, A.K. Costa, C.A. Achete and S.S. Camargo Jr., Thin Solid Films 377-378 (2000) 490.
19. R.K. Iler, The Chemistry of Silica (Wiley, New York, 1979).
20. K. Kamiya, T. Yoko, K. Tanaka and M. Takeuchi, J. Non-Cryst. Solids 121 (1990) 182.