The improvement of mechanical and dielectric properties of ordered mesoporous silica film using TEOS-MTES mixed silica precursor

Ceramics International

Volumn 34, Issue 4, 2008, Pages 947-951

  Ha, Tae Jung ^a   Choi, Sun Gyu ^a   Jung, Sang Bae ^b   Yu, Byoung Gon ^c   Park, Hyung Ho ^a  

^a Yonsei University   (South Korea)

^b LG Chemical Ltd   (South Korea)

^c Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

A. Sol gel process; Brij 76; D. SiO2; E. Insulators

Indexed keywords

DIELECTRIC PROPERTIES; MECHANICAL PROPERTIES; MESOPOROUS MATERIALS; SOL-GEL PROCESS;

MESOPOROUS SILICA FILM; PHYSICAL DIMENSION; SILICA PRECURSOR;

SILICA;

EID: 42949124908     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2007.09.070     Document Type: Article

References (20)

1. Jain A., Rogojevic S., Ponoth S., Agarwal N., Matthew I., Gill W.N., Persans P., Tomozawa M., Plawsky J.L., and Simonyi E. Thin Solid Films 398 (2001) 513
2. Maex K., Baklanov M.R., Shamiryan D., Lacopi F., Brongersma S.H., and Yanovitskaya Z.S. J. Appl. Phys. 93 (2003) 8793
3. Chen Z., and Prasad K. Appl. Phys. Lett. 84 (2004) 2242
4. Hata N., Negoro C., Yamada K., and Kikkawa T. Jpn. J. Appl. Phys., Part 1 43 (2004) 1323
5. Balkenende A.R., de Theije F.K., and Kriege J.C.K. Adv. Mater. 15 (2003) 139
6. Grosso D., Cagnol F., Soler-Illia G.J.de.A.A., Crepaldi E.L., Amenitsch H., Brunet-Bruneau A., Bourgeois A., and Sanchez C. Adv. Funct. Mater. 14 (2004) 309
7. Jung S.-B., and Park H.-H. Thin Solid Films 494 (2006) 320
8. Jung S.-B., Ha T.-J., and Park H.-H. J. Appl. Phys. 101 (2007) 024109
9. Cho A.T., Pan F.M., Chao K.J., Liu P.H., and Chen J.Y. Thin Solid Films 483 (2005) 283
10. Park B.J., Rah S.Y., Park Y.J., and Lee K.B. Rev. Sci. Instrum. 66 (1995) 1722
11. Jain A., Rogojevic S., Gill W.N., Plawsky J.L., Mattew I., Tomozawa M., and Simonyi E. J. Appl. Phys. 90 (2001) 5832
12. S.-B. Jung, T.-J. Ha, H.-H. Park, J. Colloid Interf. Sci., submitted for publication.
13. Gibaud A., Grosso D., Smarsly B., Baptiste A., Bardeau J.F., Babonneau F., Doshi D.A., Chen Z., Brinker C.J., and Sanchez C. J. Phys. Chem. B 107 (2003) 6114
14. Pai R.A., Humayun R., Schulberg M.T., Sengupta A., Sun J.N., and Watkins J.J. Science 303 (2004) 507
15. Jung S.-B., Han C.K., and Park H.-H. Appl. Surf. Sci. 244 (2005) 47
16. Yu S., Wong T.K.S., Hu X., and Yong M.S. J. Sol-Gel Sci. Technol. 35 (2005) 69
17. Lee Y.E., Kang B.S., Hyun S.H., and Lee C.H. Sep. Sci. Technol. 39 (2004) 3541
18. Huo Q., Margolese D.I., and Stucky G.D. Chem. Mater. 8 (1996) 1147
19. Matheron M., Bourgeois A., Brunet-Bruneau A., Albouy P.A., Biteau J., Gacoin T., and Boilot J.P. J. Mater. Chem. 15 (2005) 4741
20. Yang C.M., Cho A.T., Pan F.M., Tsai T.G., and Chao K.J. Adv. Mater. 13 (2001) 1099