Colloidal self-assembly-directed laser-induced non-close-packed crystalline silicon nanostructures

ACS Nano

Volumn 5, Issue 10, 2011, Pages 7960-7966

  Tan, Kwan Wee ^a   Saba, Stacey A ^a   Arora, Hitesh ^a   Thompson, Michael O ^a   Wiesner, Ulrich ^a  

^a School of Chemical and Molecular Engineering   (United States)

Author keywords

colloidal crystals; crystalline; non close packed; pulsed laser irradiation; self assembly; silicon

Indexed keywords

ADVANCED APPLICATIONS; COLLOIDAL CRYSTALS; CRYSTALLINE PHASE; CRYSTALLINE SILICONS; INVERSE OPAL; LASER INDUCED; LONG RANGE ORDERS; MELT TRANSFORMATION; NANO-STRUCTURED; NON-CLOSE-PACKED; PATTERN TRANSFERS; PULSED EXCIMER LASERS; SILICON NANOSTRUCTURES; ULTRA-FAST;

CRYSTAL SYMMETRY; CRYSTALLINE MATERIALS; EXCIMER LASERS; IRRADIATION; NANOSTRUCTURES; PULSED LASERS; SELF ASSEMBLY;

AMORPHOUS SILICON;

EID: 80054972258     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn2023446     Document Type: Article

References (55)

1. Lin, S. Y.; Fleming, J. G.; Hetherington, D. L.; Smith, B. K.; Biswas, R.; Ho, K. M.; Sigalas, M. M.; Zubrzycki, W.; Kurtz, S. R.; Bur, J. A Three-Dimensional Photonic Crystal Operating at Infrared Wavelengths Nature 1998, 394, 251-253 (Pubitemid 28335030)
2. Blanco, A.; Chomski, E.; Grabtchak, S.; Ibisate, M.; John, S.; Leonard, S. W.; Lopez, C.; Meseguer, F.; Miguez, H.; Mondia, J. P. et al. Large-Scale Synthesis of a Silicon Photonic Crystal with a Complete Three-Dimensional Bandgap near 1.5 Micrometres Nature 2000, 405, 437-440 (Pubitemid 30367415)
3. Vlasov, Y. A.; Bo, X.-Z.; Sturm, J. C.; Norris, D. J. On-Chip Natural Assembly of Silicon Photonic Bandgap Crystals Nature 2001, 414, 289-293 (Pubitemid 33097801)
4. Ibisate, M.; Golmayo, D.; López, C. Silicon Direct Opals Adv. Mater. 2009, 21, 2899-2902
5. Míguez, H.; Tétreault, N.; Yang, S. M.; Kitaev, V.; Ozin, G. A. A New Synthetic Approach to Silicon Colloidal Photonic Crystals with a Novel Topology and an Omni-Directional Photonic Bandgap: Micromolding in Inverse Silica Opal (MISO) Adv. Mater. 2003, 15, 597-600
6. Blanco, A.; López, C. Silicon Onion-Layer Nanostructures Arranged in Three Dimensions Adv. Mater. 2006, 18, 1593-1597 (Pubitemid 43979526)
7. Tian, B.; Zheng, X.; Kempa, T. J.; Fang, Y.; Yu, N.; Yu, G.; Huang, J.; Lieber, C. M. Coaxial Silicon Nanowires as Solar Cells and Nanoelectronic Power Sources Nature 2007, 449, 885-889 (Pubitemid 47598610)
8. Garnett, E. C.; Yang, P. Silicon Nanowire Radial p-n Junction Solar Cells J. Am. Chem. Soc. 2008, 130, 9224-9225 (Pubitemid 352031121)
9. Kelzenberg, M. D.; Boettcher, S. W.; Petykiewicz, J. A.; Turner-Evans, D. B.; Putnam, M. C.; Warren, E. L.; Spurgeon, J. M.; Briggs, R. M.; Lewis, N. S.; Atwater, H. A. Enhanced Absorption and Carrier Collection in Si Wire Arrays for Photovoltaic Applications Nat. Mater. 2010, 9, 239-244
10. Suezaki, T.; Chen, J. I. L.; Hatayama, T.; Fuyuki, T.; Ozin, G. A. Electrical Properties of p-Type and n-Type Doped Inverse Silicon Opals-Towards Optically Amplified Silicon Solar Cells Appl. Phys. Lett. 2010, 96, 242102
11. Taira, K.; Nakata, J. Silicon Cells: Catching Rays Nat. Photon. 2010, 4, 602-603
12. Xu, S.; Huang, S. Y.; Levchenko, I.; Zhou, H. P.; Wei, D. Y.; Xiao, S. Q.; Xu, L. X.; Yan, W. S.; Ostrikov, K. Highly Efficient Silicon Nanoarray Solar Cells by a Single-Step Plasma-Based Process Adv. Energy Mater. 2011, 1, 373-376
13. Lin, V. S.-Y.; Motesharei, K.; Dancil, K.-P. S.; Sailor, M. J.; Ghadiri, M. R. A Porous Silicon-Based Optical Interferometric Biosensor Science 1997, 278, 840-843 (Pubitemid 27467917)
14. Cui, Y.; Wei, Q.; Park, H.; Lieber, C. M. Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species Science 2001, 293, 1289-1292 (Pubitemid 32777412)
15. Li, D.; Wu, Y.; Kim, P.; Shi, L.; Yang, P.; Majumdar, A. Thermal Conductivity of Individual Silicon Nanowires Appl. Phys. Lett. 2003, 83, 2934
16. Boukai, A. I.; Bunimovich, Y.; Tahir-Kheli, J.; Yu, J.-K.; Goddard, W. A., III; Heath, J. R. Silicon Nanowires as Efficient Thermoelectric Materials Nature 2008, 451, 168-171
17. Hochbaum, A. I.; Chen, R.; Delgado, R. D.; Liang, W.; Garnett, E. C.; Najarian, M.; Majumdar, A.; Yang, P. Enhanced Thermoelectric Performance of Rough Silicon Nanowires Nature 2008, 451, 163-167
18. Lee, J.-H.; Galli, G. A.; Grossman, J. C. Nanoporous Si as an Efficient Thermoelectric Material Nano Lett. 2008, 8, 3750-3754
19. Yu, J.-K.; Mitrovic, S.; Tham, D.; Varghese, J.; Heath, J. R. Reduction of Thermal Conductivity in Phononic Nanomesh Structures Nat. Nanotechnol. 2010, 5, 718-721
20. Tang, J.; Wang, H.-T.; Lee, D. H.; Fardy, M.; Huo, Z.; Russell, T. P.; Yang, P. Holey Silicon as an Efficient Thermoelectric Material Nano Lett. 2010, 10, 4279-4283
21. Li, Y.; Cai, W.; Duan, G. Ordered Micro/Nanostructured Arrays Based on the Monolayer Colloidal Crystals Chem. Mater. 2008, 20, 615-624 (Pubitemid 351315672)
22. Zhang, J.; Li, Y.; Zhang, X.; Yang, B. Colloidal Self-Assembly Meets Nanofabrication: From Two-Dimensional Colloidal Crystals to Nanostructure Arrays Adv. Mater. 2010, 22, 4249-4269
23. Stein, A.; Li, F.; Denny, N. R. Morphological Control in Colloidal Crystal Templating of Inverse Opals, Hierarchical Structures, and Shaped Particles Chem. Mater. 2008, 20, 649-666 (Pubitemid 351315675)
24. Fenollosa, R.; Meseguer, F. Non-Close-Packed Artificial Opals Adv. Mater. 2003, 15, 1282-1285
25. King, J. S.; Gaillot, D. P.; Graugnard, E.; Summers, C. J. Conformally Back-Filled, Non-Close-Packed Inverse-Opal Photonic Crystals Adv. Mater. 2006, 18, 1063-1067 (Pubitemid 43731710)
26. 2 Hemispherical Particle Array with Hexagonal-Non-Close-Packed Tops: Synthesis and Stable Superhydrophilicity without UV Irradiation Small 2008, 4, 2286-2291
27. Gao, S.; Koshizaki, N.; Li, Y.; Li, L. Unique Hexagonal Non-Close-Packed Arrays of Alumina Obtained by Plasma Etching/Deposition with Catalytic Performance J. Mater. Chem. 2011, 21, 2087
28. Isa, L.; Kumar, K.; Müller, M.; Grolig, J.; Textor, M.; Reimhult, E. Particle Lithography from Colloidal Self-Assembly at Liquid-Liquid Interfaces ACS Nano 2010, 4, 5665-5670
29. Suezaki, T.; O'Brien, P. G.; Chen, J. I. L.; Loso, E.; Kherani, N. P.; Ozin, G. A. Tailoring the Electrical Properties of Inverse Silicon Opals-A Step Towards Optically Amplified Silicon Solar Cells Adv. Mater. 2009, 21, 559-563
30. Bao, Z.; Weatherspoon, M. R.; Shian, S.; Cai, Y.; Graham, P. D.; Allan, S. M.; Ahmad, G.; Dickerson, M. B.; Church, B. C.; Kang, Z. et al. Chemical Reduction of Three-Dimensional Silica Micro-Assemblies into Microporous Silicon Replicas Nature 2007, 446, 172-175 (Pubitemid 46398663)
31. Richman, E. K.; Kang, C. B.; Brezesinski, T.; Tolbert, S. H. Ordered Mesoporous Silicon through Magnesium Reduction of Polymer Templated Silica Thin Films Nano Lett. 2008, 8, 3075-3079
32. Hatton, B.; Mishchenko, L.; Davis, S.; Sandhage, K. H.; Aizenberg, J. Assembly of Large-Area, Highly Ordered, Crack-Free Inverse Opal Films Proc. Natl. Acad. Sci. U. S. A. 2010, 107, 10354-10359
33. Poate, J. M.; Mayer, J. W. Laser Annealing of Semiconductors; Academic Press: New York, 1982.
34. Street, R. Technology and Applications of Amorphous Silicon; Springer: New York, 2000.
35. Chou, S. Y.; Keimel, C.; Gu, J. Ultrafast and Direct Imprint of Nanostructures in Silicon Nature 2002, 417, 835-837 (Pubitemid 34670326)
36. Mendu, K. K.; Shi, J.; Lu, Y. F.; Li, L. P.; Batta, N.; Doerr, D. W.; Alexander, D. R. Fabrication of Multi-Layered Inverse Opals Using Laser-Assisted Imprinting Nanotechnology 2005, 16, 1965-1968 (Pubitemid 41107872)
37. Lu, Y.; Chen, S. C. Nanopatterning of a Silicon Surface by Near-Field Enhanced Laser Irradiation Nanotechnology 2003, 14, 505-508
38. Brodoceanu, D.; Landström, L.; Bäuerle, D. Laser-Induced Nanopatterning of Silicon with Colloidal Monolayers Appl. Phys. A: Mater. Sci. Process. 2006, 86, 313-314
39. Li, L.; Guo, W.; Wang, Z. B.; Liu, Z.; Whitehead, D.; Luk'yanchuk, B. Large-Area Laser Nano-Texturing with User-Defined Patterns J. Micromech. Microeng. 2009, 19, 054002
40. Arora, H.; Du, P.; Tan, K. W.; Hyun, J. K.; Grazul, J.; Xin, H. L.; Muller, D. A.; Thompson, M. O.; Wiesner, U. Block Copolymer Self-Assembly- Directed Single-Crystal Homo- and Heteroepitaxial Nanostructures Science 2010, 330, 214-219
41. Zhou, Z.; Zhao, X. S. Opal and Inverse Opal Fabricated with a Flow-Controlled Vertical Deposition Method Langmuir 2005, 21, 4717-4723 (Pubitemid 40683407)
42. Tan, K. W.; Li, G.; Koh, Y. K.; Yan, Q.; Wong, C. C. Layer-by-Layer Growth of Attractive Binary Colloidal Particles Langmuir 2008, 24, 9273-9278
43. Tan, K. W.; Koh, Y. K.; Chiang, Y.-M.; Wong, C. C. Particulate Mobility in Vertical Deposition of Attractive Monolayer Colloidal Crystals Langmuir 2010, 26, 7093-7100
44. Auston, D. H.; Surko, C. M.; Venkatesan, T. N. C.; Slusher, R. E.; Golovchenko, J. A. Time-Resolved Reflectivity of Ion-Implanted Silicon During Laser Annealing Appl. Phys. Lett. 1978, 33, 437
45. Thompson, M. O.; Galvin, G. J.; Mayer, J. W.; Peercy, P. S.; Poate, J. M.; Jacobson, D. C.; Cullis, A. G.; Chew, N. G. Melting Temperature and Explosive Crystallization of Amorphous Silicon During Pulsed Laser Irradiation Phys. Rev. Lett. 1984, 52, 2360
46. Giermann, A. L.; Thompson, C. V. Solid-State Dewetting for Ordered Arrays of Crystallographically Oriented Metal Particles Appl. Phys. Lett. 2005, 86, 121903
47. Oh, Y.-J.; Ross, C. A.; Jung, Y. S.; Wang, Y.; Thompson, C. V. Cobalt Nanoparticle Arrays Made by Templated Solid-State Dewetting Small 2009, 5, 860-865
48. Li, J. G.; Hausner, H. Wetting and Adhesion in Liquid Silicon/Ceramic Systems Mater. Lett. 1992, 14, 329-332 (Pubitemid 23589920)
49. Fork, D. K.; Anderson, G. B.; Boyce, J. B.; Johnson, R. I.; Mei, P. Capillary Waves in Pulsed Excimer Laser Crystallized Amorphous Silicon Appl. Phys. Lett. 1996, 68, 2138
50. Mei, P.; Boyce, J. B.; Hack, M.; Lujan, R. A.; Johnson, R. I.; Anderson, G. B.; Fork, D. K.; Ready, S. E. Laser Dehydrogenation/Crystallization of Plasma-Enhanced Chemical Vapor Deposited Amorphous Silicon for Hybrid Thin Film Transistors Appl. Phys. Lett. 1994, 64, 1132
51. McCulloch, D. J.; Brotherton, S. D. Surface Roughness Effects in Laser Crystallized Polycrystalline Silicon Appl. Phys. Lett. 1995, 66, 2060
52. Riley, E. K.; Liddell, C. M. Confinement-Controlled Self Assembly of Colloids with Simultaneous Isotropic and Anisotropic Cross-Section Langmuir 2010, 26, 11648-11656
53. Voronoi and Nearest Neighbor Pattern Analysis Algorithms. http://people.ccmr.cornell.edu/∼uli/pages/idl.htm (accessed Mar 11, 2011).
54. Hu, S.; Leu, P. W.; Marshall, A. F.; McIntyre, P. C. Single-Crystal Germanium Layers Grown on Silicon by Nanowire Seeding Nat. Nanotechnol. 2009, 4, 649-653
55. Nelson, E. C.; Dias, N. L.; Bassett, K. P.; Dunham, S. N.; Verma, V.; Miyake, M.; Wiltzius, P.; Rogers, J. A.; Coleman, J. J.; Li, X.; et al. Epitaxial Growth of Three-Dimensionally Architectured Optoelectronic Devices. Nat. Mater. 2011, [Advance Online Publication]. DOI: 10.1038/nmat3071. Published online: July 24, 2011.