Large-area laser nano-texturing with user-defined patterns

Journal of Micromechanics and Microengineering

Volumn 19, Issue 5, 2009, Pages

  Li, L ^a   Guo, W ^a   Wang, Z B ^a   Liu, Z ^a   Whitehead, D ^a   Luk'yanchuk, B ^b  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b DATA STORAGE INSTITUTE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM SCANNING; CHEMICAL SOLUTIONS; DIFFRACTION LIMITS; ENVIRONMENTAL CONDITIONS; LENS ARRAY; MICRO-SCALES; NANO-SIZED; NANO-SIZED FEATURES; NANOTEXTURING; NEAR-FIELD ENHANCEMENT; SELF-ASSEMBLED; SINGLE SHOTS; TECHNICAL CHALLENGES; TECHNOLOGY DEVELOPMENT; USER-DEFINED FEATURES;

LENSES; OPTICAL INSTRUMENTS; TECHNOLOGICAL FORECASTING;

LASERS;

EID: 70349970393     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/5/054002     Document Type: Article

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