Optimization of the mechanical properties of magnetron sputtered diamond-like carbon coatings

Diamond and Related Materials

Volumn 20, Issue 5-6, 2011, Pages 682-686

  Sonderby S ^a,b   Berthelsen, A N ^a   Almtoft, K P ^b   Christensen, B H ^b   Nielsen, L P ^b   Bottiger J ^a  

^a AARHUS UNIVERSITY   (Denmark)

^b DANISH TECHNOLOGICAL INSTITUTE   (Denmark)

Author keywords

Annealing; DLC; Hardness; Nanoindentation; Raman spectroscopy; Stress

Indexed keywords

CARBON TARGETS; DIAMOND-LIKE CARBON COATINGS; DLC; HIGH HARDNESS; INDUSTRIAL DEPOSITION SYSTEMS; POOR ADHESION; REACTIVE DC MAGNETRON SPUTTERING; REACTIVE GAS; ROCKWELL; THERMAL-ANNEALING;

ADHESION; COMPRESSIVE STRESS; DIAMONDS; HARDNESS; NANOINDENTATION; OPTIMIZATION; RAMAN SCATTERING; RAMAN SPECTROSCOPY; TENSILE STRESS;

COATINGS;

EID: 79956083523     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2011.03.016     Document Type: Article

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