Raman spectroscopy study of the influence of processing conditions on the structure of polycrystalline diamond films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 2, 2006, Pages 179-189

  Ramamurti, R ^a   Shanov, V ^a   Singh, R N ^a   Mamedov, S ^b   Boolchand, P ^b  

^a UNIVERSITY OF CINCINNATI   (United States)

^b University of Cincinnati   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS MIXTURE; GROWTH RATE; NANOCRYSTALLINE DIAMOND FILMS;

CARBON; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SILICON; SUBSTRATES;

DIAMOND FILMS;

EID: 33644558063     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2150228     Document Type: Article

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