Effect of thin aluminum coatings on structural damping of silicon microresonators

Materials Research Society Symposium Proceedings

Volumn 1222, Issue , 2010, Pages 83-88

  Sosale, Guruprasad ^a   Prabhakar, Sairam ^a   Frechette, Luc ^b   Vengallatore, Srikar ^a  

^a MCGILL UNIVERSITY   (Canada)

^b UNIVERSITÉ DE SHERBROOKE   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURATE MEASUREMENT; ALUMINUM CAN; ALUMINUM FILM; DAMPING FACTORS; HIGH PERFORMANCE DEVICES; MICROMECHANICAL RESONATOR; NANOMECHANICAL RESONATORS; NEW APPROACHES; QUALITY FACTORS; SILICON BEAMS; SILICON MICRORESONATORS; SINGLE CRYSTAL SILICON; STRUCTURAL DAMPING; THERMOELASTIC DAMPING; THIN METALLIC COATINGS;

ALUMINUM; COMPOSITE FILMS; DAMPING; MEMS; MICROELECTROMECHANICAL DEVICES; PROTECTIVE COATINGS; RESONATORS; THERMOELASTICITY;

ALUMINUM COATINGS;

EID: 77955934930     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

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4. S. Prabhakar and S. Vengallatore, J Micromech. Microeng, 17, 532 (2007).