Elastometric sensing using higher flexural eigenmodes of microcantilevers

Applied Physics Letters

Volumn 91, Issue 18, 2007, Pages

  Spletzer, Matthew ^a   Raman, Arvind ^a   Reifenberger, Ron ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL MATERIALS; CANTILEVER BEAMS; COATINGS; EIGENVALUES AND EIGENFUNCTIONS; ELASTIC WAVES; RESONANCE; VISCOELASTICITY;

ELASTOMETRIC SENSING; FLEXURAL EIGENMODES; MICROCANTILEVER ARRAYS; MICROCANTILEVER COATING;

SENSORS;

EID: 35649009848     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2803215     Document Type: Article

References (13)

1. B. Rogers, L. Manning, M. Jones, T. Sulchek, K. Murray, B. Beneschott, J. D. Adams, Z. Hu, T. Thundat, H. Cavazos, and S. C. Minne, Rev. Sci. Instrum. 74, 4899 (2003).
2. F. M. Battiston, J.-P. Ramseyer, H. P. Lang, M. K. Baller, Ch. Gerber, J. K. Gimzewski, and H.-J. Güntherodt, Sens. Actuators B 0925-4005 10.1016/S0925-4005(01)00683-9 77, 122 (2001); B. Ilic, D. Czaplewski, M. Zalalutdinov, and H. G. Craighead, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1421572 19, 2825 (2001) L. B. Sharos, A. Raman, S. Crittenden, and R. Reifenberger, Appl. Phys. Lett. 0003-6951 10.1063/1.1759379 84, 4638, (2004); S. Dohn, R. Sandberg, W. Svendsen, and A. Boisen, Appl. Phys. Lett. 86, 233501 (2005).
3. F. M. Battiston, J.-P. Ramseyer, H. P. Lang, M. K. Baller, Ch. Gerber, J. K. Gimzewski, and H.-J. Güntherodt, Sens. Actuators B 0925-4005 10.1016/S0925-4005(01)00683-9 77, 122 (2001); B. Ilic, D. Czaplewski, M. Zalalutdinov, and H. G. Craighead, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1421572 19, 2825 (2001) L. B. Sharos, A. Raman, S. Crittenden, and R. Reifenberger, Appl. Phys. Lett. 0003-6951 10.1063/1.1759379 84, 4638, (2004); S. Dohn, R. Sandberg, W. Svendsen, and A. Boisen, Appl. Phys. Lett. 86, 233501 (2005).
4. F. M. Battiston, J.-P. Ramseyer, H. P. Lang, M. K. Baller, Ch. Gerber, J. K. Gimzewski, and H.-J. Güntherodt, Sens. Actuators B 0925-4005 10.1016/S0925-4005(01)00683-9 77, 122 (2001); B. Ilic, D. Czaplewski, M. Zalalutdinov, and H. G. Craighead, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1421572 19, 2825 (2001) L. B. Sharos, A. Raman, S. Crittenden, and R. Reifenberger, Appl. Phys. Lett. 0003-6951 10.1063/1.1759379 84, 4638, (2004); S. Dohn, R. Sandberg, W. Svendsen, and A. Boisen, Appl. Phys. Lett. 86, 233501 (2005).
5. F. M. Battiston, J.-P. Ramseyer, H. P. Lang, M. K. Baller, Ch. Gerber, J. K. Gimzewski, and H.-J. Güntherodt, Sens. Actuators B 0925-4005 10.1016/S0925-4005(01)00683-9 77, 122 (2001); B. Ilic, D. Czaplewski, M. Zalalutdinov, and H. G. Craighead, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.1421572 19, 2825 (2001) L. B. Sharos, A. Raman, S. Crittenden, and R. Reifenberger, Appl. Phys. Lett. 0003-6951 10.1063/1.1759379 84, 4638, (2004); S. Dohn, R. Sandberg, W. Svendsen, and A. Boisen, Appl. Phys. Lett. 86, 233501 (2005).
6. A. Gupta, P. Nair, D. Akin, M. Ladisch, S. Broyles, M. Alam, and R. Bashir, Proc. Natl. Acad. Sci. U.S.A. 0027-8424 103, 13362 (2006); J. Tamayo, D. Ramos, J. Mertens, and M. Calleja, Appl. Phys. Lett. 0003-6951 10.1063/1.2388925 89, 224104 (2006); T. Thundat, S. Sharp, W. Fisher, R. Warmack, and E. Wachter, Appl. Phys. Lett. 66, 1563 (1995).
7. A. Gupta, P. Nair, D. Akin, M. Ladisch, S. Broyles, M. Alam, and R. Bashir, Proc. Natl. Acad. Sci. U.S.A. 0027-8424 103, 13362 (2006); J. Tamayo, D. Ramos, J. Mertens, and M. Calleja, Appl. Phys. Lett. 0003-6951 10.1063/1.2388925 89, 224104 (2006); T. Thundat, S. Sharp, W. Fisher, R. Warmack, and E. Wachter, Appl. Phys. Lett. 66, 1563 (1995).
8. A. Gupta, P. Nair, D. Akin, M. Ladisch, S. Broyles, M. Alam, and R. Bashir, Proc. Natl. Acad. Sci. U.S.A. 0027-8424 103, 13362 (2006); J. Tamayo, D. Ramos, J. Mertens, and M. Calleja, Appl. Phys. Lett. 0003-6951 10.1063/1.2388925 89, 224104 (2006); T. Thundat, S. Sharp, W. Fisher, R. Warmack, and E. Wachter, Appl. Phys. Lett. 66, 1563 (1995).
9. R. Benson, Nucl. Instrum. Methods Phys. Res. B 191, 752 (2002).
10. G. Lubarsky, M. Davidson, and R. Bradley, Surf. Sci. 558, 135 (2004).
11. L. Meirovitch, Principles and Techniques of Vibrations (Prentice Hall, Upper Saddle River, NJ, 1997), p. 237.
12. The ith eigenmode of a uniform microcantilever has been scaled such that 0L ψ i,xx 2 dx=1.
13. Norland Optical Adhesive (NOA) 61, Norland Products, Inc., Cranbury, NJ. The elastic modulus of the polymer after complete curing is given as 1.03 GPa.