Adhesion force measurement system for micro-objects in a scanning electron microscope

Review of Scientific Instruments

Volumn 71, Issue 8, 2000, Pages 3123-3131

  Miyazaki, Hideki T ^a,b   Tomizawa, Yasushi ^c   Koyano, Koichi ^d   Sato, Tomomasa ^e   Shinya, Norio ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c TOSHIBA CORPORATION   (Japan)

^d HITACHI LTD   (Japan)

^e UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001716498     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1305812     Document Type: Review

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