Electrostatically actuated carbon nanowire nanotweezers

Smart Materials and Structures

Volumn 18, Issue 6, 2009, Pages

  Chang, Jiyoung ^a   Min, Byung Kwon ^b   Kim, Jongbaeg ^b   Lee, Sang Jo ^b   Lin, Liwei ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOWIRE; DEEP REACTIVE ION ETCHING; FIB-CVD; GAP CLOSING; HEAVILY DOPED; MODULUS OF ELASTICITY; NANO-SCALE OBJECTS; NANOTWEEZERS; OPERATION VOLTAGE; PARALLEL NANOWIRES; POTENTIAL APPLICATIONS; PROTOTYPE DEVICES; SINGLE-MASK; SOI WAFERS;

ELECTRIC POTENTIAL; ELECTRIC WIRE; ELECTROSTATIC ACTUATORS; FOCUSED ION BEAMS; MICROELECTRODES; NANOWIRES; REACTIVE ION ETCHING; SILICON WAFERS;

CHEMICAL VAPOR DEPOSITION;

EID: 68549104417     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/18/6/065017     Document Type: Article

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