Dynamics of micro-object operation considering the adhesive effect under an SEM

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4568, Issue , 2001, Pages 12-23

  Saito, Shigeki ^a   Miyazaki, Hideki T ^b   Sato, Tomomasa ^c   Takahashi, Kunio ^a   Onzawa, Tadao ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

Adhesion; Fracture; Micro object; Pick; Place; Rolling resistance

Indexed keywords

ADHESIVES; FRACTURE; MANIPULATORS; SCANNING ELECTRON MICROSCOPY;

MICRO-OBJECT OPERATIONS;

ROBOTICS;

EID: 0035768198     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.444134     Document Type: Article

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