SCOPUS 정보 검색 플랫폼

Volumn 1, Issue 3, 2011, Pages

Development of microfabricated TiO2 channel waveguides

(8) Furuhashi, Masayuki a Fujiwara, Masazumi a,b Ohshiro, Takahito a Tsutsui, Makusu a Matsubara, Kazuki a Taniguchi, Masateru a Takeuchi, Shigeki a,b Kawai, Tomoji a,c

a OSAKA UNIVERSITY (Japan)

b HOKKAIDO UNIVERSITY (Japan)

c Konkuk University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

MICROANALYSIS; MICROFABRICATION; OXIDE MINERALS; PLASMA FILLED WAVEGUIDES; REFRACTIVE INDEX; SUBSTRATES; TITANIUM DIOXIDE;

CHANNEL WAVEGUIDE; HIGH REFRACTIVE INDEX; LINEAR WAVEGUIDES; MICROFABRICATED; MICROFABRICATION PROCESS; OPTICAL CHANNEL WAVEGUIDE; PROPAGATION LOSS; SIGNAL PROPAGATION DELAYS;

OPTICAL WAVEGUIDES;

EID: 80053499794 PISSN: None EISSN: 21583226 Source Type: Journal
DOI: 10.1063/1.3615716 Document Type: Article

Times cited : (53)

References (26)

1
- 0034205060
- 10.1016/S0169-4332(00)00126-4
- L. C. Kimerling, Appl. Surf. Sci. 159-160, 8 (2000). 10.1016/S0169- 4332(00)00126-4
- (2000) Appl. Surf. Sci. , vol.159-160 , pp. 8
- Kimerling, L.C.¹

2
- 33845665708
- On-chip optical interconnect roadmap: Challenges and critical directions
- DOI 10.1109/JSTQE.2006.880615
- M. Haurylau, C. Guoqing, C. Hui, Z. Jidong, N. A. Nelson, D. H. Albonesi, E. G. Friedman and P. M. Fauchet, IEEE J. Sel. Top. Quantum Electron. 12, 1699 (2006). 10.1109/JSTQE.2006.880615 (Pubitemid 44956143)
- (2006) IEEE Journal on Selected Topics in Quantum Electronics , vol.12 , Issue.6 , pp. 1699-1704
- Haurylau, M.¹ Chen, G.² Chen, H.³ Zhang, J.⁴ Nelson, N.A.⁵ Albonesi, D.H.⁶ Friedman, E.G.⁷ Fauchet, P.M.⁸

3
- 0346096514
- Subwavelength-diameter silica wires for low-loss optical wave guiding
- DOI 10.1038/nature02193
- L. Tong, R. R. Gattass, J. B. Ashcom, S. He, J. Lou, M. Shen, I. Maxwell and E. Mazur, Nature 426, 816 (2003). 10.1038/nature02193 (Pubitemid 38056861)
- (2003) Nature , vol.426 , Issue.6968 , pp. 816-819
- Tong, L.¹ Gattass, R.R.² Ashcom, J.B.³ He, S.⁴ Lou, J.⁵ Shen, M.⁶ Maxwell, I.⁷ Mazur, E.⁸

4
- 14644430340
- Assembly of silica nanowires on silica aerogels for microphotonic devices
- DOI 10.1021/nl0481977
- L. Tong, J. Lou, R. R. Gattass, S. He, X. Chen, Liu and E. Mazur, Nano Lett. 5, 259 (2005). 10.1021/nl0481977 (Pubitemid 40308281)
- (2005) Nano Letters , vol.5 , Issue.2 , pp. 259-262
- Tong, L.¹ Lou, J.² Gattass, R.R.³ He, S.⁴ Chen, X.⁵ Liu, L.⁶ Mazur, E.⁷

5
- 38649137749
- Glass nanofibers for micro- and nano-scale photonic devices
- DOI 10.1016/j.jnoncrysol.2006.10.090, PII S002230930701191X
- L. Tong and E. Mazur, J. Non-Cryst. Solids 354, 1240 (2008). 10.1016/j.jnoncrysol.2006.10.090 (Pubitemid 351172309)
- (2008) Journal of Non-Crystalline Solids , vol.354 , Issue.12-13 , pp. 1240-1244
- Tong, L.¹ Mazur, E.²

6
- 0000743781
- 10.1364/OL.22.000475
- J. Takahara, S. Yamagishi, H. Taki, A. Morimoto and T. Kobayashi, Opt. Lett. 22, 475 (1997). 10.1364/OL.22.000475
- (1997) Opt. Lett. , vol.22 , pp. 475
- Takahara, J.¹ Yamagishi, S.² Taki, H.³ Morimoto, A.⁴ Kobayashi, T.⁵

7
- 0026867689
- 10.1143/JJAP.31.1593
- M. Haruna, Y. Murata and H. Nishihara, Jpn. J. Appl. Phys., Part 1 31, 1593 (1992). 10.1143/JJAP.31.1593
- (1992) Jpn. J. Appl. Phys., Part 1 , vol.31 , pp. 1593
- Haruna, M.¹ Murata, Y.² Nishihara, H.³

8
- 31444456146
- 10.1021/ja055377p
- K. S. Park, E. K. Seo, Y. R. Do, K. Kim and M. M. Sung, J. Am. Chem. Soc. 128, 858 (2005). 10.1021/ja055377p
- (2005) J. Am. Chem. Soc. , vol.128 , pp. 858
- Park, K.S.¹ Seo, E.K.² Do, Y.R.³ Kim, K.⁴ Sung, M.M.⁵

9
- 41849126058
- 2 resist
- DOI 10.1149/1.2883730
- B. Liu and S.-T. Ho, J. Electrochem. Soc. 155, P57 (2008). 10.1149/1.2883730 (Pubitemid 351502425)
- (2008) Journal of the Electrochemical Society , vol.155 , Issue.5
- Liu, B.¹ Ho, S.-T.²

10
- 72849139197
- 10.1116/1.3246394
- K.-m. Yoon, K.-Y. Yang, H. Lee and H.-S. Kim, J. Vac. Sci. Technol. B 27, 2810 (2009). 10.1116/1.3246394
- (2009) J. Vac. Sci. Technol. B , vol.27 , pp. 2810
- Yoon, K.-M.¹ Yang, K.-Y.² Lee, H.³ Kim, H.-S.⁴

11
- 0035965955
- 2 thin films
- DOI 10.1016/S0169-4332(01)00562-1, PII S0169433201005621
- S. Norasetthekul, P. Y. Park, K. H. Baik, K. P. Lee, J. H. Shin, B. S. Jeong, V. Shishodia, E. S. Lambers, D. P. Norton and S. J. Pearton, Appl. Surf. Sci. 185, 27 (2001). 10.1016/S0169-4332(01)00562-1 (Pubitemid 33126024)
- (2001) Applied Surface Science , vol.185 , Issue.1-2 , pp. 27-33
- Norasetthekul, S.¹ Park, P.Y.² Baik, K.H.³ Lee, K.P.⁴ Shin, J.H.⁵ Jeong, B.S.⁶ Shishodia, V.⁷ Lambers, E.S.⁸ Norton, D.P.⁹ Pearton, S.J.¹⁰

12
- 0022128460
- DOI 10.1016/0022-3093(85)90400-4
- A. Bornstein, N. Croitoru and E. Marom, J. Non-Cryst. Solids 74, 57 (1985). 10.1016/0022-3093(85)90400-4 (Pubitemid 15589656)
- (1985) Journal of Non-Crystalline Solids , vol.74 , Issue.1 , pp. 57-65
- Bornstein, A.¹ Croitoru, N.² Marom, E.³

13
- 0027579223
- Investigations of titanium oxide films deposited by d.c. reactive magnetron sputtering in different sputtering pressures
- DOI 10.1016/0040-6090(93)90200-9
- L.-J. Meng and M. P. dos Santos, Thin Solid Films 226, 22 (1993). 10.1016/0040-6090(93)90200-9 (Pubitemid 23639828)
- (1993) Thin Solid Films , vol.226 , Issue.1 , pp. 22-29
- Meng, L.-J.¹ Dos Santos, M.P.²

14
- 70449461507
- 10.1016/j.tsf.2009.09.076
- C. K. Chung, M. W. Liao and C. W. Lai, Thin Solid Films 518, 1415 (2009). 10.1016/j.tsf.2009.09.076
- (2009) Thin Solid Films , vol.518 , pp. 1415
- Chung, C.K.¹ Liao, M.W.² Lai, C.W.³

15
- 34047183665
- 2 thin films by pulsed dc magnetron with oxygen as sputter gas
- DOI 10.1063/1.2714770
- A. Karuppasamy and A. Subrahmanyam, J. Appl. Phys. 101, 064318 (2007). 10.1063/1.2714770 (Pubitemid 46517077)
- (2007) Journal of Applied Physics , vol.101 , Issue.6 , pp. 064318
- Karuppasamy, A.¹ Subrahmanyam, A.²

16
- 0033284287
- 2 thin films based on variable-angle spectroscopic ellipsometry measurements
- DOI 10.1016/S0921-5107(99)00335-9
- D. Mardare and P. Hones, Mater. Sci. Eng., B 68, 42 (1999). 10.1016/S0921-5107(99)00335-9 (Pubitemid 32083264)
- (1999) Materials Science and Engineering B: Solid-State Materials for Advanced Technology , vol.68 , Issue.1 , pp. 42-47
- Mardare, D.¹ Hones, P.²

17
- 33748604758
- A study of the optical properties of titanium oxide films prepared by dc reactive magnetron sputtering
- DOI 10.1016/j.apsusc.2005.10.012, PII S0169433205014807
- L.-J. Meng, V. Teixeira, H. N. Cui, F. Placido, Z. Xu and M. P. dos Santos, Appl. Surf. Sci. 252, 7970 (2006). 10.1016/j.apsusc.2005.10.012 (Pubitemid 44376489)
- (2006) Applied Surface Science , vol.252 , Issue.22 , pp. 7970-7974
- Meng, L.-J.¹ Teixeira, V.² Cui, H.N.³ Placido, F.⁴ Xu, Z.⁵ Dos Santos, M.P.⁶

18
- 70249146541
- 10.1088/0022-3727/42/10/105204
- V. Strak, M. ada, M. Quaas, S. Block, R. Bogdanowicz,. Kment, H. Wulff, Z. Hubika, C. A. Helm, M. Tich and R. Hippler, J. Phys. D: Appl. Phys. 42, 105204 (2009). 10.1088/0022-3727/42/10/105204
- (2009) J. Phys. D: Appl. Phys. , vol.42 , pp. 105204
- Strak, V.¹ Ada, M.² Quaas, M.³ Block, S.⁴ Bogdanowicz, R.⁵ Kment⁶ Wulff, H.⁷ Hubika, Z.⁸ Helm, C.A.⁹ Tich, M.¹⁰ Hippler, R.¹¹

19
- 0038209696
- 10.1016/S0169-4332(03)00015-1
- S. Tanemura, L. Miao, P. Jin, K. Kaneko, A. Terai and N. Nabatova-Gabain, Appl. Surf. Sci. 212-213, 654 (2003). 10.1016/S0169-4332(03)00015-1
- (2003) Appl. Surf. Sci. , vol.212-213 , pp. 654
- Tanemura, S.¹ Miao, L.² Jin, P.³ Kaneko, K.⁴ Terai, A.⁵ Nabatova-Gabain, N.⁶

20
- 4544288481
- 10.1063/1.351264
- M. H. Suhail, G. M. Rao and S. Mohan, J. Appl. Phys. 71, 1421 (1992). 10.1063/1.351264
- (1992) J. Appl. Phys. , vol.71 , pp. 1421
- Suhail, M.H.¹ Rao, G.M.² Mohan, S.³

21
- 65649133629
- 10.1016/j.tsf.2009.03.159
- H. Xie, F. L. Ng and X. T. Zeng, Thin Solid Films 517, 5066 (2009). 10.1016/j.tsf.2009.03.159
- (2009) Thin Solid Films , vol.517 , pp. 5066
- Xie, H.¹ Ng, F.L.² Zeng, X.T.³

22
- 0033715072
- 10.1016/S0040-6090(00)01015-4
- D. Mergel, D. Buschendorf, S. Eggert, R. Grammes and B. Samset, Thin Solid Films 371, 218 (2000). 10.1016/S0040-6090(00)01015-4
- (2000) Thin Solid Films , vol.371 , pp. 218
- Mergel, D.¹ Buschendorf, D.² Eggert, S.³ Grammes, R.⁴ Samset, B.⁵

23
- 0004359338
- 10.1364/OL.23.001417
- W.-H. Wang and S. Chao, Opt. Lett. 23, 1417 (1998). 10.1364/OL.23.001417
- (1998) Opt. Lett. , vol.23 , pp. 1417
- Wang, W.-H.¹ Chao, S.²

24
- 0001039489
- 10.1063/1.1308532
- K. K. Lee, D. R. Lim, H.-C. Luan, A. Agarwal, J. Foresi and L. C. Kimerling, Appl. Phys. Lett. 77, 1617 (2000). 10.1063/1.1308532
- (2000) Appl. Phys. Lett. , vol.77 , pp. 1617
- Lee, K.K.¹ Lim, D.R.² Luan, H.-C.³ Agarwal, A.⁴ Foresi, J.⁵ Kimerling, L.C.⁶

25
- 35549008124
- 2 thin films prepared by sol-gel method for waveguiding applications: Correlation between the structural and optical properties
- DOI 10.1016/j.optmat.2007.02.047, PII S0925346707000924
- R. Mechiakh, F. Meriche, R. Kremer, R. Bensaha, B. Boudine and A. Boudrioua, Optical Materials 30, 645 (2007). 10.1016/j.optmat.2007.02.047 (Pubitemid 350016810)
- (2007) Optical Materials , vol.30 , Issue.4 , pp. 645-651
- Mechiakh, R.¹ Meriche, F.² Kremer, R.³ Bensaha, R.⁴ Boudine, B.⁵ Boudrioua, A.⁶

26
- 77955873341
- 10.1364/AO.49.004321
- T. Alasaarela, T. Saastamoinen, J. Hiltunen, A. Syntjoki, A. Tervonen, P. Stenberg, M. Kuittinen and S. Honkanen, Appl. Opt. 49, 4321 (2010). 10.1364/AO.49.004321
- (2010) Appl. Opt. , vol.49 , pp. 4321
- Alasaarela, T.¹ Saastamoinen, T.² Hiltunen, J.³ Syntjoki, A.⁴ Tervonen, A.⁵ Stenberg, P.⁶ Kuittinen, M.⁷ Honkanen, S.⁸

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.