Optical properties of polycrystalline and epitaxial anatase and rutile TiO 2 thin films by rf magnetron sputtering

Applied Surface Science

Volumn 212-213, Issue SPEC., 2003, Pages 654-660

  Tanemura, S ^a   Miao, L ^a   Jin, P ^b   Kaneko, K ^c   Terai, A ^d   Nabatova Gabain, N ^d  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c KYUSHU UNIVERSITY   (Japan)

^d Horiba Jobin Yvon Co Ltd   (Japan)

Author keywords

Complex refractive index; Optical band gap; SE; Thin film; TiO 2

Indexed keywords

ELLIPSOMETRY; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; REFRACTIVE INDEX; THIN FILMS;

OPTICAL BAND GAP;

TITANIUM DIOXIDE;

EID: 0038209696     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00015-1     Document Type: Conference Paper

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