Complex three-dimensional high aspect ratio microfluidic network manufactured in combined PerMX dry-resist and SU-8 technology

Biomicrofluidics

Volumn 5, Issue 3, 2011, Pages

  Meier, Robert Ch ^a   Badilita, Vlad ^a   Brunne, Jens ^a   Wallrabe, Ulrike ^a   Korvink, Jan G ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COMPLEX NETWORKS; FLUIDIC DEVICES; MANUFACTURE; PHOTORESISTS;

BONDING INTERFACES; FABRICATION METHOD; HIGH ASPECT RATIO; INTERLAYER ADHESION; MICROFLUIDIC CHIP; MICROFLUIDIC NETWORKS; NETWORK COMPLEXITY; PROCESS COMPATIBILITY;

MICROFLUIDICS;

EID: 80053454312     PISSN: 19321058     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3613668     Document Type: Article

References (39)

1. Martinez A.W. Phillips S.T. Whitesides G. Proc. Natl. Acad. Sci. USA 2008, 105:19606. 10.1073/pnas.0810903105, and.
2. Tani H. Maehana K. Kamidate T. Anal. Chem. 2004, 76:6693. 10.1021/ac049401d, and.
3. Therriault D. White S.R. Lewis J.A. Nat. Mater. 2003, 2:265. 10.1038/nmat863, and.
4. Dittrich P.S. Manz A. Nat. Rev. Drug Discov. 2006, 5:210. 10.1038/nrd1985, and.
5. Unger M.A. Chou H.-P. Thorsen T. Scherer A. Quake S.R. Science 2000, 288:113. 10.1126/science.288.5463.113, and.
6. Sun Y. Kwok Y.C. Nguyen N.-T. J. Micromech. Microeng. 2006, 16:1681. 10.1088/0960-1317/16/8/033, and.
7. Bilenberg B. Nielsen T. Clausen B. Kristensen A. J. Micromech. Microeng. 2004, 14:814. 10.1088/0960-1317/14/6/008, and.
8. Tsao C.W. Hromada L. Liu J. Kumar P. DeVoe D.L. Lab Chip 2007, 7:499. 10.1039/B618901F, and.
9. Blanco F.J. Agirregabiria M. Garcia J. Berganzo J. Tijero M. Arroyo M.T. Ruano J.M. Aramburu I. Mayora K. J. Micromech. Microeng. 2004, 14:1047. 10.1088/0960-1317/14/7/027, and.
10. Svasek P. Svasek E. Lendl B. Vellekoop M. Sens. Actuators A 2004, 115:591. 10.1016/j.sna.2004.03.055, and.
11. Tuomikoski S. Franssila S. Sens. Actuators A 2005, 120:408. 10.1016/j.sna.2005.01.012, and.
12. Agirregabiria M. Blanco F.J. Berganzo J. Arroyo M.T. Fullaondo A. Mayora K. Ruano-López J.M. Lab Chip 2005, 5:545. 10.1039/b500519a, and.
13. Anderson J.R. Chiu D.T. Jackman R.J. Cherniavskaya O. McDonald J.C. Wu H. Whitesides S.H. Whitesides G.M. Anal. Chem. 2000, 72:3158. 10.1021/ac9912294, and.
14. Zhang M. Wu J. Wang L. Xiao K. Wen W. Lab Chip 2010, 10:1199. 10.1039/B923101C, and.
15. Mosadegh B. Agarwal M. Torisawa Y.-S. Takayama S. Lab Chip 2010, 10:1983. 10.1039/C003590D, and.
16. Zheng Y. Dai W. Ryan D. Wu H. Biomicrofluidics 2010, 4:036504. 10.1063/1.3491474, and.
17. Yun K.-S. Yoon E. Lab Chip 2008, 8:245. 10.1039/b712932g, and.
18. Reed H.A. White C.E. Rao V. Allen S.A. B. Henderson C.L. Kohl P.A. J. Micromech. Microeng. 2001, 11:733. 10.1088/0960-1317/11/6/317, and.
19. Metz S. Jiguet S. Bertsch A. Renaud P. Lab Chip 2004, 4:114. 10.1039/b310866j, and.
20. Abgrall P. Lattes C. Conédéra V. Dollat X. Colin S. Gué A.M. J. Micromech. Microeng. 2006, 16:113. 10.1088/0960-1317/16/1/016, and.
21. Stöhr U. Vulto P. Hoppe P. Urban G. Reinecke H. J. Micro/Nanolith. MEMS MOEMS 2008, 7:033009. 10.1117/1.2964217, and.
22. Kalkandjiev K. Riegger L. Kosse D. Welsche M. Gutzweiler L. Zengerle R. Koltay P. J. Micromech. Microeng. 2011, 21:025008. 10.1088/0960-1317/21/2/025008, and.
23. Lorenz H. Despont M. Fahrni N. Labiance N. Renaud P. Vettiger P. J. Micromech. Microeng. 1997, 7:121. 10.1088/0960-1317/7/3/010, and.
24. Lee K.Y. LaBianca N. Rishton S.A. J. Vac. Sci. Technol. B 1995, 13:3012. 10.1116/1.588297, and.
25. Voskerician G. Shive M.S. Shawgo R.S. v. Recum H. Anderson J.M. Cima M.J. Langer R. Biomaterials 2003, 24:1959. 10.1016/S0142-9612(02)00565-3, and.
26. Chronis N. Lee L.P. J. Microelectromech. Syst. 2005, 14:857. 10.1109/JMEMS.2005.845445, and.
27. Jenke M.G. Schreiter C. Kim G.M. Vogel H. Brugger J. Microfluid. Nanofluid. 2007, 3:189. 10.1007/s10404-006-0119-2, and.
28. Stangegaard M. Wang Z. Kutter J.P. Dufva M. Wolff A. Mol. BioSyst. 2006, 2:421. 10.1039/b608239d, and.
29. Marie R. Schmid S. Johansson A. Ejsing L. Nordström M. Häflinger D. Christensen C.B. V. Boisen A. Dufva M. Biosens. Bioelectron. 2006, 21:1327. 10.1016/j.bios.2005.03.004, and.
30. Kotzar G. Freas M. Abel P. Fleischman A. Roy S. Zorman C. Moran J.M. Melzak J. Biomaterials 2002, 23:2737. 10.1016/S0142-9612(02)00007-8, and.
31. Altuna A. Gabriel G. de la Prida L.M. Tijero M. Guimerá A. Berganzo J. Salido R. Villa R. Fernández L.J. J. Micromech. Microeng. 2010, 20:064014. 10.1088/0960-1317/20/6/064014, and.
32. Walther F. Davydovskaya P. Zürcher S. Kaiser M. Herberg H. Gigler A.M. Stark R.W. J. Micromech. Microeng. 2007, 17:524. 10.1088/0960-1317/17/3/015, and.
33. Nordström M. Marie R. Calleja M. Boisen A. J. Micromech. Microeng. 2004, 14:1614. 10.1088/0960-1317/14/12/003, and.
34. Tao S.L. Popat K.C. Norman J.J. Desai T.A. Langmuir 2008, 24:2631. 10.1021/la703066z, and.
35. Deepu A. Sai V.V. Mukherji S. J. Mater Sci. Mater. Med. 2009, 20:25. 10.1007/s10856-008-3471-9, and.
36. Hwang K.-Y. Park C.-S. Kim J.-H. Suh K.-Y. Cho E.-C. Hih N. J. Micromech. Microeng. 2010, 20:117001. 10.1088/0960-1317/20/11/117001, and.
37. Kim H. Najafi K. J. Microelectromech. Syst. 2005, 14:1347. 10.1109/JMEMS.2005.859102, and.
38. Toepke M.W. Beebe D.J. Lab Chip 2006, 6:1484. 10.1039/b612140c, and.
39. Sadeghi M. Kim H. Najafi K. Proceedings of the IEEE Conference on Micro-Electro-Mechanical Systems 2010, 15-18. 10.1109/MEMSYS.2010.5442576, and in Hong Kong S.A.R., China, 24-28 January p.