Fabrication of miniaturized fluidic devices using SU-8 based lithography and low temperature wafer bonding

Sensors and Actuators, A: Physical

Volumn 115, Issue 2-3 SPEC. ISS., 2004, Pages 591-599

  Svasek, Peter ^a   Svasek, Edeltraud ^a   Lendl, Bernhard ^b   Vellekoop, Michael ^b  

^a LUDWIG BOLTZMANN INSTITUTE FOR LUNG VASCULAR RESEARCH   (Austria)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Fluidic device; FTIR spectroscopy; Micromixer; SU 8; Wafer bonding

Indexed keywords

ACTUATORS; BONDING; ELECTROPHORESIS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LITHOGRAPHY; SENSORS;

FLUIDIC DEVICE; MICROMIXER; SU-8; WAFER BONDING;

POLYMERS;

EID: 4544285779     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.03.055     Document Type: Conference Paper

References (10)

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