Electrostatically driven micro-hydraulic actuator arrays

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 15-18

  Sadeghi, Mahdi ^a   Kim, Hanseup ^a   Najafi, Khalil ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURVED ELECTRODE; ELECTROSTATIC CONTROL; ELECTROSTATICALLY DRIVEN; FABRICATION TECHNIQUE; HYDRAULIC ACTUATOR;

ACTUATORS; AMPLIFICATION; HYDRAULIC EQUIPMENT; HYDRAULICS; MECHANICAL ENGINEERING; MECHANICS; REACTIVE ION ETCHING;

ELECTROSTATIC ACTUATORS;

EID: 77952783192     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442576     Document Type: Conference Paper

References (3)

1. H. Kim, K. Najafi, "An electrically-driven, large-deflection, high-force, micro piston hydraulic actuator array for large-scale micro-fluidic systems," Proc IEEE MEMS, Sorrento, pp. 483-486, 2009.
2. th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (μTAS '07), France, pp. 1735-1737, 2007.
3. B. Nguyen, E. Iwase, K. Matsumoto, I. Shimoyama, "Electrically driven varifocal micro lens fabricated by deposition Parylene directly on liquid," Proc IEEE MEMS, Kobe, pp. 305-308, 2007.