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Volumn 21, Issue 8, 2010, Pages 817-821

Measurements of dielectric properties of TiO2 thin films at microwave frequencies using an extended cavity perturbation technique

Author keywords

[No Author keywords available]

Indexed keywords

BOROSILICATE GLASS; MICROWAVE DEVICES; MICROWAVE FREQUENCIES; OXIDES; PERMITTIVITY; PERTURBATION TECHNIQUES; SUBSTRATES; TITANIUM DIOXIDE;

EID: 80053374441     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-009-9999-8     Document Type: Article
Times cited : (11)

References (34)
  • 2
    • 33646895966 scopus 로고    scopus 로고
    • Complex permittivity measurements of thin ferroelectric films employing split post dielectric resonator
    • Foz do Iguacu, Brazil, 5-9 Sept
    • J. Krupka, W.T. Huang, M.J. Tung, Complex permittivity measurements of thin ferroelectric films employing split post dielectric resonator. 11th international meeting on ferroelectricity, Foz do Iguacu, Brazil, 5-9 Sept 2005
    • (2005) 11th International Meeting on Ferroelectricity
    • Krupka, J.1    Huang, W.T.2    Tung, M.J.3
  • 4
    • 0026159190 scopus 로고    scopus 로고
    • Improved technique for measuring permittivity of thin dielectrics with a cylindrical resonator cavity
    • 14-16 May 1991
    • M.D. Janezic, J.H. Grosvenor, Improved technique for measuring permittivity of thin dielectrics with a cylindrical resonator cavity. IMTC 1991-instrumentation and measurement technology conference, 14-16 May 1991, pp. 580-584
    • IMTC 1991-Instrumentation and Measurement Technology Conference , pp. 580-584
    • Janezic, M.D.1    Grosvenor, J.H.2
  • 5
    • 33846210961 scopus 로고    scopus 로고
    • Paraelectric thin films by nanoscale engineering of epitaxy and planar anisotropy for microwave phase shifter applications
    • E.K. Akdogan, W.K. Simon, A. Safari, Paraelectric thin films by nanoscale engineering of epitaxy and planar anisotropy for microwave phase shifter applications. IEEE Trans. Ultrason. Ferroelectr. Freq. Control 53(12), 2323-2332 (2006)
    • (2006) IEEE Trans. Ultrason. Ferroelectr. Freq. Control , vol.53 , Issue.12 , pp. 2323-2332
    • Akdogan, E.K.1    Simon, W.K.2    Safari, A.3
  • 6
  • 8
    • 34547155591 scopus 로고    scopus 로고
    • Microwave dielectric properties of strained ba0.5sr0.5tio3 films with and without strain-induced permanent polarization at room temperature
    • W. Chang, L.M.B. Alldredge, S.W. Kirchoefer, J.M. Pond, Microwave dielectric properties of strained Ba0.5Sr0.5TiO3 films with and without strain-induced permanent polarization at room temperature. J. Appl. Phys. 102, 014105 (2007)
    • (2007) J. Appl. Phys. , vol.102 , pp. 014105
    • Chang, W.1    Alldredge, L.M.B.2    Kirchoefer, S.W.3    Pond, J.M.4
  • 11
    • 33747335140 scopus 로고    scopus 로고
    • Ferroelectric properties of pbxsr1-xtio3 and its compositionally graded thin films grown on the highly oriented lanio3 buffered pt/ti/sio2/si substrates
    • J. Zhaia, X. Yao, Z. Xu, H. Chen, Ferroelectric properties of PbxSr1-xTiO3 and its compositionally graded thin films grown on the highly oriented LaNiO3 buffered Pt/Ti/SiO2/Si substrates. J. Appl. Phys. 100, 034108 (2006)
    • (2006) J. Appl. Phys. , vol.100 , pp. 034108
    • Zhaia, J.1    Yao, X.2    Xu, Z.3    Chen, H.4
  • 12
    • 0001228144 scopus 로고    scopus 로고
    • Improved low frequency and microwave dielectric response in strontium titanate thin films grown by pulsed laser ablation
    • M.J. Dalberth, R.E. Stauber, J.C. Price, C.T. Rogers, D. Galt, Improved low frequency and microwave dielectric response in strontium titanate thin films grown by pulsed laser ablation. Appl. Phys. Lett. 72(4), 507-509 (1998)
    • (1998) Appl. Phys. Lett. , vol.72 , Issue.4 , pp. 507-509
    • Dalberth, M.J.1    Stauber, R.E.2    Price, J.C.3    Rogers, C.T.4    Galt, D.5
  • 13
    • 0035395955 scopus 로고    scopus 로고
    • Concentration dependence of the dielectric constant in mixed oxides mxoympoq
    • R.A.B. Devine, A.G. Revesz, Concentration dependence of the dielectric constant in mixed oxides MxOyMpOq. J. Appl. Phys. 90(11), 389-393 (2001)
    • (2001) J. Appl. Phys. , vol.90 , Issue.11 , pp. 389-393
    • Devine, R.A.B.1    Revesz, A.G.2
  • 14
    • 38149012994 scopus 로고    scopus 로고
    • Dielectric and microwave properties of ba(sn0.15ti0.85)o3 thin films
    • S.N. Song, J.W. Zhai, X. Yao, Dielectric and microwave properties of Ba(Sn0.15Ti0.85)O3 thin films. Mater. Lett. 62, 1173-1175 (2008)
    • (2008) Mater. Lett. , vol.62 , pp. 1173-1175
    • Song, S.N.1    Zhai, J.W.2    Yao, X.3
  • 16
    • 47049100100 scopus 로고    scopus 로고
    • Microstructure and dielectric response of srtio3/ndgao3 interdigitated capacitors
    • S.K. Hodak, C.T. Rogers, Microstructure and dielectric response of SrTiO3/NdGaO3 interdigitated capacitors. Microelectron. Eng. 85, 444-451 (2008)
    • (2008) Microelectron. Eng. , vol.85 , pp. 444-451
    • Hodak, S.K.1    Rogers, C.T.2
  • 17
    • 51249125245 scopus 로고    scopus 로고
    • Properties of nixzn(1-x)fe2o4 thick films at microwave frequencies
    • D.C. Kulkarni, S.P. Patil, V. Puri, Properties of NixZn(1-x)Fe2O4 thick films at microwave frequencies. Microelectron. J. 39, 248-252 (2008)
    • (2008) Microelectron. J. , vol.39 , pp. 248-252
    • Kulkarni, D.C.1    Patil, S.P.2    Puri, V.3
  • 18
    • 0029326353 scopus 로고
    • Ferroelectric thin film characterization using superconducting microstrip resonators
    • D. Galt, J.C. Price, J.A. Beall, T.E. Harvey, Ferroelectric thin film characterization using superconducting microstrip resonators. IEEE Trans. Appl. Supercond. 5(2), 2575-2578 (1995)
    • (1995) IEEE Trans. Appl. Supercond. , vol.5 , Issue.2 , pp. 2575-2578
    • Galt, D.1    Price, J.C.2    Beall, J.A.3    Harvey, T.E.4
  • 19
    • 34347347162 scopus 로고    scopus 로고
    • Microwave performance of thin film ferroelectric varactors in the wide temperature range of -223°c to ?227°c. J
    • A. Vorobiev, S. Gevorgian, Microwave performance of thin film ferroelectric varactors in the wide temperature range of -223°C to ?227°C. J. Eur. Ceram. Soc. 27, 3847-3850 (2007)
    • (2007) Eur. Ceram. Soc. , vol.27 , pp. 3847-3850
    • Vorobiev, A.1    Gevorgian, S.2
  • 20
    • 33750617935 scopus 로고    scopus 로고
    • Study of thick film ni(1-x)coxmn2o4 (0 b x b1) using overlay technique on thick film microstrip ring resonator
    • S.A. Kanadea, V. Puri, Study of thick film Ni(1-x)CoxMn2O4, (0 B x B1) using overlay technique on thick film microstrip ring resonator. Microelectron. J. 37, 1302-1305 (2006)
    • (2006) Microelectron. J. , vol.37 , pp. 1302-1305
    • Kanadea, S.A.1    Puri, V.2
  • 21
    • 33846459231 scopus 로고
    • Dielectric measurements on substrates materials at microwave frequencies using a cavity perturbation technique
    • D.C. Dube, M.T. Lanagan, J.H. Kim, S.J. Jang, Dielectric measurements on substrates materials at microwave frequencies using a cavity perturbation technique. J. Appl. Phys. 63(7), 2466-2468 (1988)
    • (1988) J. Appl. Phys. , vol.63 , Issue.7 , pp. 2466-2468
    • Dube, D.C.1    Lanagan, M.T.2    Kim, J.H.3    Jang, S.J.4
  • 22
    • 13444267608 scopus 로고    scopus 로고
    • Study of microwave dielectric properties measurements by various resonance techniques
    • J. Sheen, Study of microwave dielectric properties measurements by various resonance techniques. Measurement 37, 123-130 (2005)
    • (2005) Measurement , vol.37 , pp. 123-130
    • Sheen, J.1
  • 23
    • 34547196863 scopus 로고    scopus 로고
    • Amendment of cavity perturbation technique for loss tangent measurement at microwave frequencies
    • J. Sheen, Amendment of cavity perturbation technique for loss tangent measurement at microwave frequencies. J. Appl. Phys. 102(1), 014102 (2007)
    • (2007) J. Appl. Phys. , vol.102 , Issue.1 , pp. 014102
    • Sheen, J.1
  • 24
    • 33947588097 scopus 로고    scopus 로고
    • High temperature dielectric study of cr2o3 in microwave region
    • D.C. Dube, D. Agrawal, S. Agrawal, R. Roy, High temperature dielectric study of Cr2O3 in microwave region. Appl. Phys. Lett. 90, 124105 (2007)
    • (2007) Appl. Phys. Lett. , vol.90 , pp. 124105
    • Dube, D.C.1    Agrawal, D.2    Agrawal, S.3    Roy, R.4
  • 25
    • 0038007975 scopus 로고    scopus 로고
    • Microwave permittivity and permeability of ferrite-polymerthick films
    • A. Verma, A.K. Saxena, D.C. Dube, Microwave permittivity and permeability of ferrite-polymerthick films. J. Magn. Magn. Mater. 263, 228-234 (2003)
    • (2003) J. Magn. Magn. Mater. , vol.263 , pp. 228-234
    • Verma, A.1    Saxena, A.K.2    Dube, D.C.3
  • 26
    • 17944363003 scopus 로고    scopus 로고
    • Dielectric measurement of ferroelectric sr0.61ba0.39nb2o6 single crystal fiber using cavity perturbation method
    • C. Huang, A.S. Bhalla, M.T. Lanagan, L.E. Cross, R. Guo, Dielectric measurement of ferroelectric Sr0.61Ba0.39Nb2O6 single crystal fiber using cavity perturbation method. Appl. Phys. Lett. 86, 122903 (2005)
    • (2005) Appl. Phys. Lett. , vol.86 , pp. 122903
    • Huang, C.1    Bhalla, A.S.2    Lanagan, M.T.3    Cross, L.E.4    Guo, R.5
  • 27
    • 14544292431 scopus 로고    scopus 로고
    • Estimation of complex permittivity of arbitrary shape and size dielectric samples using cavity measurement technique at microwave frequencies
    • M. Santra, K.U. Limaye, Estimation of complex permittivity of arbitrary shape and size dielectric samples using cavity measurement technique at microwave frequencies. IEEE Trans. Microw. Theory Tech. 53, 718-722 (2005)
    • (2005) IEEE Trans. Microw. Theory Tech. , vol.53 , pp. 718-722
    • Santra, M.1    Limaye, K.U.2
  • 28
    • 0033345519 scopus 로고    scopus 로고
    • Amendment of cavity perturbation method for permittivity measurement of extremely low-loss dielectrics
    • L.F. Chen, C.K. Ong, B.T.G. Tan, Amendment of cavity perturbation method for permittivity measurement of extremely low-loss dielectrics. IEEE Trans. Instrum. Meas. 48, 1031-1037 (1999)
    • (1999) IEEE Trans. Instrum. Meas. , vol.48 , pp. 1031-1037
    • Chen, L.F.1    Ong, C.K.2    Tan, B.T.G.3
  • 29
    • 0001343287 scopus 로고
    • New approach to the perturbation of cavity resonators by homogeneous, isotropic spheres
    • M.E. Brodwin, M.K. Parsons, New approach to the perturbation of cavity resonators by homogeneous, isotropic spheres. J. Appl. Phys. 36, 494-504 (1965)
    • (1965) J. Appl. Phys. , vol.36 , pp. 494-504
    • Brodwin, M.E.1    Parsons, M.K.2
  • 33
    • 0000861643 scopus 로고    scopus 로고
    • Structural and optical properties of sputtered titania films
    • S.B. Amor, G. Baud, J.P. Besse, M. Jacquet, Structural and optical properties of sputtered Titania films. Mater. Sci. Eng. B 47, 110-118 (1997)
    • (1997) Mater. Sci. Eng. B , vol.47 , pp. 110-118
    • Amor, S.B.1    Baud, G.2    Besse, J.P.3    Jacquet, M.4
  • 34
    • 36149014791 scopus 로고
    • Infrared absorption of reduced rutile tio2 single crystals
    • D.C. Cronemeyer, Infrared absorption of reduced rutile TiO2 single crystals. Phys. Rev. 113, 1222-1226 (1959)
    • (1959) Phys. Rev. , vol.113 , pp. 1222-1226
    • Cronemeyer, D.C.1


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