Microstructure and dielectric response of SrTiO3/NdGaO3 interdigitated capacitors

Microelectronic Engineering

Volumn 85, Issue 2, 2008, Pages 444-451

  Hodak, Satreerat K ^a   Rogers, Charles T ^b  

^a CHULALONGKORN UNIVERSITY   (Thailand)

^b UNIVERSITY OF COLORADO   (United States)

Author keywords

Dielectric properties; Grain size; Strontium titanate

Indexed keywords

ALKALINE EARTH METALS; LITHOGRAPHY; STRONTIUM; STRONTIUM COMPOUNDS;

DIELECTRIC RESPONSE (DR); STRONTIUM TITANATE;

STRONTIUM ALLOYS;

EID: 47049100100     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.08.007     Document Type: Article

References (30)

1. Findikoglu A.T., Doughty C., Anlage S.M., Li Q., Xi X.X., and Vankatesan T. J. Appl. Phys. 76 (1994) 2937
2. Christen H.M., Mannhart J., Williams E.J., and Gerber C. Phys. Rev. B 49 17 (1994) 12095-12104
3. Galt D., Price J.C., Bealle J.A., and Ono R.H. Appl. Phys. Lett. 63 22 (1993) 3078-3080
4. Muller K.A., and Burkard H. Phys. Rev. B 19 7 (1979) 3593-3602
5. Cowley R.A. Phys. Rev. Lett. 9 (1962) 159
6. Viana R., Lunkenheimer P., Hemberger J., Bohmer R., and Loidl A. Phys. Rev. B 50 (1994) 601-604
7. Fu C., Yang C., Chen H., Hu L., and Wang Y. Mater. Lett. 59 (2005) 330-333
8. Suzuki K., and Kijima K. Vacuum 80 (2006) 519
9. Martirena H.T., and Burfoot J.C. J. Phy. C: Solid State Phys. 7 (1974) 3182-3192
10. Wang X., Olafsson S., Sandstrom P., and Helmersson U. Thin Solid Films 360 (1999) 181-186
11. S. Kampangkeaw, C.T. Rogers, in: Materials Issues for Tunable RF and Microwave Devices III, Materials Research Society Symposium Proceedings, USA, H2.5.1-H2.5.5 (2002) 720.
12. Dalberth M.J., Stauber R.E., Price J.C., and Rogers C.T. Appl. Phys. Lett. 72 4 (1998) 507-509
13. Sirena M., Haberkorn N., Granada M., Steren L., and Guimpel J. J. Magn. Mater. 272-276 1 (2004) 1171-1173
14. Chang W., Horwitz J.S., Carter A., Pond J.M., Kirchoefer S., Gilmore C.M., and Chrisey D. Appl. Phys. Lett. 74 (1999) 1033
15. Galt D., Price J., Beall J.A., and Harvey T.E. IEEE Trans. Appl. Supercond. 5 (1995) 2575
16. Li H.-C., Si W., West A.D., and Xi X.X. Appl. Phys. Lett. 73 (1998) 190-192
17. The National Synchrotron Light Source, Brookhaven National Laboratory, New York (Beam line X10A).
18. James R.W. The Optical Principles of the Diffraction of X-rays (1958), G. Bell and Sons Ltd., London
19. Balzar D., Ramakrshnan P.A., Spagnol P., Mani S., Hermann A.M., and Matin M.A. Jpn. J. Appl. Phys. 41 (2002) 6628-6632
20. Hull D., and Bacon D. Introduction to Dislocations (2001), Butterworth Heinemann, UK
21. Rietveld H.M. Acta Crystallogr. 22 (1967) 151-152
22. Toby B.H. J. Appl. Crystallogr. 34 (2001) 210-213
23. International Table for X-ray Crystallography, Kynoch Press, for the International Union of Crystallography, Birmingham, England, 1952-1974.
24. Ostapchuk T., Petzelt J., Zelezny V., Pashkin A., Pokorny J., and Drbohlav I. Phys. Rev. B 66 23 (2002) 2354061-23540612
25. Gao Y., Masuda Y., Yonezawa T., and Koumoto K. Mater. Sci. Eng. B99 (2003) 290-293
26. Peng L.S.-J., Xi X.X., Moeckly B.H., and Alpay S.P. Appl. Phys. Lett. 83 22 (2003) 4592-4594
27. M.J. Dalberth, J.C. Price, C.T. Rogers, in: Ferroelectric Thin Films VI, Materials Research Society Symposium Proceedings, USA, 493 (1998) 371.
28. Ye H., Sun C.Q., and Hing P. J. Phys. D 34 (2001) 148
29. Petrov P.K., and Alford N.M. Appl. Phys. Lett. 87 (2005) 222902
30. Treece R.E., Thompson J.B., Mueller C.H., Rivkin T., and Cromar M.W. IEEE Trans. Appl. Supercond. 7 2 (1997)