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Materials Science and Engineering B

Volumn 47, Issue 2, 1997, Pages 110-118

Structural and optical properties of sputtered Titania films

(4) Ben Amor, S a Baud, G a Besse, J P a Jacquet, M a

a UNIVERSITÉ CLERMONT AUVERGNE (France)

Author keywords

Magnetron sputtering; Sputtering; Titania thin films

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; CRYSTAL MICROSTRUCTURE; MAGNETRON SPUTTERING; PRESSURE EFFECTS; REFRACTIVE INDEX; SPUTTER DEPOSITION; STOICHIOMETRY; STRESSES; THERMAL EFFECTS; THIN FILMS; TITANIUM OXIDES;

BENDING BEAM METHOD;

AMORPHOUS FILMS;

EID: 0000861643 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/s0921-5107(97)00027-5 Document Type: Article

Times cited : (75)

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