Growth and characterization of piezoelectric AlN thin films for diamond-based surface acoustic wave devices

Thin Solid Films

Volumn 497, Issue 1-2, 2006, Pages 304-308

  Benetti, M ^a   Cannata D ^a   Di Pietrantonio, F ^a   Verona, E ^a   Generosi, A ^b   Paci, B ^b   Rossi Albertini, V ^b  

^a CNR Consiglio Nazionale delle Ricerche   (Italy)

^b CNR   (Italy)

Author keywords

Aluminium nitride; Diamond; Sputtering

Indexed keywords

ACOUSTIC DEVICES; ALUMINUM NITRIDE; DIAMONDS; FILM GROWTH; PIEZOELECTRIC MATERIALS; SPUTTERING;

ALN; PIEZOELECTRIC FILMS; REACTIVE DIODE SPUTTERING;

THIN FILMS;

EID: 30344476410     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.10.073     Document Type: Article

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