AlN on silicon based surface acoustic wave resonators operating at 5GHz

Electronics Letters

Volumn 45, Issue 23, 2009, Pages 1196-1197

  Neculoiu, D ^a   Muller A ^a   Deligeorgis, G ^a,b   Dinescu, A ^a   Stavrinidis, A ^b   Vasilache, D ^a   Cismaru, A M ^a   Stan, G E ^c   Konstantinidis, G ^b  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b INSTITUTE OF ELECTRONIC STRUCTURE AND LASER   (Greece)

^c NATIONAL INSTITUTE OF MATERIALS PHYSICS   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALN LAYERS; BANDSTOP FREQUENCIES; CHARACTERISATION; DIRECT WRITING; E-BEAM LITHOGRAPHY; ELECTROMECHANICAL COUPLING COEFFICIENTS; GIGAHERTZ FREQUENCIES; HIGH RESISTIVITY; INTERDIGITAL TRANSDUCER; ON WAFER MICROWAVE MEASUREMENTS; ORIENTED SILICON; SILICON-BASED; SURFACE ACOUSTIC WAVE RESONATORS;

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ELECTROMECHANICAL DEVICES; RESONATORS; SEMICONDUCTING ALUMINUM COMPOUNDS; SILICON WAFERS; ULTRASONIC TRANSDUCERS;

ACOUSTIC WAVES;

EID: 70449369266     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el.2009.2520     Document Type: Article

References (6)

1. Chen, S.W., Lin, H.F., Sung, T.T., Wu, J.D., Kao, H.L., and Chen, J.S.: ' Synthesis and SAW characteristics of AlN thin films fabricated on Si and GaN using helicon sputtering system ', Electron. Lett., 2003, 39, (23), p. 1691-1693 10.1049/el:20031088 0013-5194
2. Muller, A., Neculoiu, D., Konstantinidis, G., Stavrinidis, A., Vasilache, D., Cismaru, A., Danila, M., Dragoman, M., Deligeorgis, G., and Tsagaraki, K.: ' 6.3GHz film bulk acoustic resonator structures based on a gallium nitride/silicon thin membrane ', IEEE Electron Device Lett., 2009, 30, (8), p. 799-801 0741-3106
3. Kirsch, P., Assouar, M.B., Elmazria, O., Mortet, V., and Alnot, P.: ' 5GHz surface acoustic wave devices based on aluminium nitride/diamond layered structure realised using electron beam lithography ', Appl. Phys. Lett., 2006, 88, p. 223504 10.1063/1.2208372 0003-6951 (Pubitemid 43839260)
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5. Hoang, T., Rey, P., Vaudaine, M.H., Robert, P., and Benech, P.: ' The hybrid model for SAW filter ', 15th, IEEE Int. Conf. on Electronics, Circuits and Systems (ICECS), St. Julians, Malta, 2008, p. 336-339, 2008
6. Elmazria, O., El Hakiki, M., Mortet, V., Assouar, B.M., Nesladek, M., Vanecek, M., Bergonzo, P., and Alnot, O.: ' Effect of diamond nucleation process on propagation losses of AlN/diamond SAW filter ', IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 2004, 51, (12), p. 1704-1709 0885-3010