Preparation of superior lubricious amorphous carbon films co-doped by silicon and aluminum

Journal of Applied Physics

Volumn 110, Issue 5, 2011, Pages

  Liu, Xiaoqiang ^a,b   Hao, Junying ^a   Yang, Jun ^a   Zheng, Jianyun ^a,b   Liang, Yongmin ^a   Liu, Weimin ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT AIR; CARBON BOND; CO-DOPED; ELASTIC RECOVERY; MECHANICAL AND TRIBOLOGICAL PROPERTIES; RADIO FREQUENCIES; SCRATCH TEST; STAINLESS STEEL SUBSTRATES;

ALUMINUM; ALUMINUM COATINGS; AMORPHOUS CARBON; AMORPHOUS FILMS; AMORPHOUS SILICON; FILM PREPARATION; SILICON; STAINLESS STEEL; WEAR RESISTANCE;

CARBON FILMS;

EID: 80052952940     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3626929     Document Type: Conference Paper

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