On the properties of nanocomposite amorphous carbon films prepared by off-plane double bend filtered cathodic vacuum arc

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 177-184

  Tay, B K ^a   Zhang, P ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

a C:Me films; Diamond like carbon; Filtered cathodic vacuum arc; Hardness; Stress

Indexed keywords

ADHESION; DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; NANOSTRUCTURED MATERIALS; RESIDUAL STRESSES; THICK FILMS; THIN FILMS;

FILTERED CATHODIC VACUUM ARCS;

AMORPHOUS FILMS;

EID: 0037011089     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00795-2     Document Type: Conference Paper

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