Hydrogen softening and optical transparency in Si-incorporated hydrogenated amorphous carbon films

Journal of Applied Physics

Volumn 98, Issue 10, 2005, Pages

  Abbas, G A ^a   Papakonstantinou, P ^a   McLaughlin, J A ^a   Weijers Dall, T D M ^b   Elliman, R G ^b   Filik, J ^c  

^a UNIVERSITY OF ULSTER   (United Kingdom)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^c UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL TRANSPARENCY; SOFTENING BEHAVIOR;

CARBON; ELLIPSOMETRY; HYDROGENATION; REFLECTION; RESIDUAL STRESSES; SILICON; THIN FILMS;

HYDROGEN;

EID: 28744447303     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2132088     Document Type: Article

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