Superlow friction of titanium/silicon codoped hydrogenated amorphous carbon film in the ambient air

Journal of Applied Physics

Volumn 108, Issue 3, 2010, Pages

  Jiang, Jinlong ^a,b,c   Hao, Junying ^a   Wang, Peng ^a   Liu, Weimin ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b LANZHOU UNIVERSITY OF TECHNOLOGY   (China)

^c UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT AIR; AMORPHOUS STRUCTURES; ATTENUATED TOTAL REFLECTANCE FOURIER TRANSFORM INFRARED SPECTROSCOPY; BALL-ON-DISK; CARBON ATOMS; CARBON SURFACE; CO-DOPED; ELASTIC RECOVERY; H/E RATIO; HYDROGEN ATOMS; HYDROGENATED AMORPHOUS CARBON FILMS; HYDROGENATED CARBON FILMS; MECHANICAL AND TRIBOLOGICAL PROPERTIES; NANOINDENTOR; RAMAN ANALYSIS; REACTIVE MAGNETRON SPUTTERING; RELATIVE HUMIDITIES; SI (100) SUBSTRATE; SUPERLOW FRICTION; TRANSFER FILM; TRIBOCHEMICAL REACTION; TRIBOMETERS; WEAR RATES; WORN SURFACE;

AMORPHOUS CARBON; AMORPHOUS FILMS; ARGON; ATMOSPHERIC HUMIDITY; CARBON FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; FRICTION; HYDROGEN; HYDROGENATION; MECHANICAL PROPERTIES; METHANE; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SURFACE REACTIONS; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 77955893775     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3462469     Document Type: Article

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