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Volumn 203, Issue 8, 2009, Pages 981-985
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Superlow friction behavior of Si-doped hydrogenated amorphous carbon film in water environment
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Author keywords
a C:H:Si film; Superlow friction coefficient; Tribochemical reaction; Water environment
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Indexed keywords
AMORPHOUS CARBON;
AMORPHOUS SILICON;
CARBON FILMS;
DIAMOND FILMS;
DIAMONDS;
ELECTROMAGNETIC WAVES;
FRICTION;
HYDROGENATION;
PHOTOELECTRON SPECTROSCOPY;
PLASMA DEPOSITION;
SILICA;
SILICIDES;
SILICON;
SILICON CARBIDE;
SILICON COMPOUNDS;
TRIBOLOGY;
WATER VAPOR;
X RAY ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
A-C:H:SI FILM;
ATOMIC CONCENTRATIONS;
BOUNDARY LUBRICATIONS;
COLLOIDAL SILICAS;
FRICTION BEHAVIORS;
HYDROGENATED AMORPHOUS CARBON FILMS;
HYDROGENATED AMORPHOUS CARBONS;
RADIO FREQUENCIES;
RAMAN SPECTROMETRIES;
SI FILMS;
SPUTTERING DEPOSITIONS;
SUPERLOW FRICTION COEFFICIENT;
SUPERLOW FRICTIONS;
TRIBOCHEMICAL REACTION;
TRIBOCHEMICAL REACTIONS;
TRIBOMETER;
WATER ENVIRONMENT;
WATER ENVIRONMENTS;
WATER MOLECULES;
X-RAY DIFFRACTIONS;
X-RAY PHOTOELECTRON SPECTROSCOPIES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
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EID: 57549116197
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2008.09.025 Document Type: Article |
Times cited : (65)
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References (29)
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