Interface strength of structured nanocolumns grown by glancing angle deposition

Engineering Fracture Mechanics

Volumn 78, Issue 16, 2011, Pages 2800-2808

  Hirakata, Hiroyuki ^a   Nishihira, Taku ^a   Yonezu, Akio ^a   Minoshima, Kohji ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Fracture; Glancing angle deposition; Interfaces; Nanocolumns; Titanium

Indexed keywords

ASYMMETRIC NANOSTRUCTURES; CRITICAL FORCE; GLANCING ANGLE DEPOSITION; INTERFACE STRENGTH; INTERFACIAL FRACTURE; LOADING DIRECTION; LOCAL STRESS DISTRIBUTION; NANOCOLUMN; NANOCOLUMNS; NANOSCALE REGIONS; NORMAL STRESS; SI SUBSTRATES; STRESS SINGULARITIES;

FINITE ELEMENT METHOD; FRACTURE; LOADING; STRESS ANALYSIS; STRESS CONCENTRATION; TITANIUM;

INTERFACES (MATERIALS);

EID: 80052870642     PISSN: 00137944     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.engfracmech.2011.08.005     Document Type: Article

References (36)

1. Suzuki M., Taga Y. Integrated sculptured thin films. Jpn J Appl Phys 2 2001, 40:L358-L359.
2. Robbie K., Brett M.J. Sculptured thin films and glancing angle deposition: growth mechanics and applications. J Vac Sci Technol A 1997, 15:1460-1465.
3. Robbie K., Brett M.J., Lakhtakia A. First thin-film realization of a helicoidal bianisotropic medium. J Vac Sci Technol A 1995, 13:2991-2993.
4. Seto M.W., Dick B., Brett M.J. Microsprings and microcantilevers: studies of mechanical response. J Micromech Microeng. 2001, 11:582-588.
5. Seto M.W., Robbie K., Vick D., Brett M.J., Kuhn L. Mechanical response of thin films with helical microstructures. J Vac Sci Technol B 1999, 17:2172-2177.
6. Liu D.L., Ye D.X., Khan F., Tang F., Lim B.K., Picu R.C., et al. Mechanics of patterned helical Si springs on Si substrate. J Nanosci Nanotechnol 2003, 3:492-495.
7. Gaire C., Ye D.X., Tang F., Picu R.C., Wang G.C., Lu T.M. Mechanical testing of isolated amorphous silicon slanted nanorods. J Nanosci Nanotechnol 2005, 5:1893-1897.
8. Gaire C., Ye D.X., Lu T.M., Wang G.C., Picu R.C. Deformation of amorphous silicon nanostructures subjected to monotonic and cyclic loading. J Mater Res 2008, 23:328-335.
9. Hirakata H., Matsumoto S., Takemura M., Suzuki M., Kitamura T. Anisotropic deformation of thin films comprised of helical nanosprings. Int J Solids Struct 2007, 44:4030-4038.
10. Sumigawa T., Hirakata H., Takemura M., Matsumoto S., Suzuki M., Kitamura T. Disappearance of stress singularity at interface edge due to nanostructured thin film. Engng Fract Mech 2008, 75:3073-3083.
11. Sumigawa T., Sueda T., Futamura Y., Suzuki M., Kitamura T. Effect of interface layer consisting of nanosprings on stress field near interface edge. Engng Fract Mech 2009, 76:1336-1344.
12. Bogy D.B. 2 Edge-bonded elastic wedges of different materials and wedge angles under surface tractions. J Appl Mech 1971, 38:377-386.
13. Bogy D.B. Edge-bonded dissimilar orthogonal elastic wedges under normal and shear loading. J Appl Mech 1968, 35:460-466.
14. Kitamura T., Hirakata H., Itsuji T. Effect of residual stress on delamination from interface edge between nano-films. Engng Fract Mech 2003, 70:2089-2101.
15. Akisanya A.R., Meng C.S. Initiation of fracture at the interface corner of bi-material joints. J Mech Phys Solids 2003, 51:27-46.
16. Labossiere P.E.W., Dunn M.L., Cunningham S.J. Application of bimaterial interface corner failure mechanics to silicon/glass anodic bonds. J Mech Phys Solids 2002, 50:405-433.
17. Reedy E.D., Guess T.R. Butt-joint tensile-strength - interface corner stress intensity factor prediction. J Adhes Sci Technol 1995, 9:237-251.
18. Hattori T., Sakata S., Hatsuda T., Murakami G. A stress singularity parameter approach for evaluating adhesive strength. JSME Int J I-Solid M 1988, 31:718-723.
19. Gradin P.A. A fracture criterion for edge-bonded bimaterial bodies. J Compos Mater 1982, 16:448-456.
20. Hirakata H., Takahashi Y., Van Truong D., Kitamura T. Role of plasticity on interface crack initiation from a free edge and propagation in a nano-component. Int J Fract 2007, 145:261-271.
21. Hirakata H., Takahashi Y., Matsumoto S., Kitamura T. Dominant stress region for crack initiation at interface edge of microdot on a substrate. Engng Fract Mech 2006, 73:2698-2709.
22. Hirakata H., Hirako T., Takahashi Y., Matsuoka Y., Kitamura T. Creep crack initiation at a free edge of an interface between submicron thick elements. Engng Fract Mech 2008, 75:2907-2920.
23. Hirakata H., Kitamura T., Yamamoto Y. Direct measurement of interface strength between copper submicron-dot and silicon dioxide substrate. JSME Int J A - Solid M 2004, 47:324-330.
24. Kitamura T., Hirakata H., Satake Y. Applicability of fracture mechanics on brittle delamination of nanoscale film edge. JSME Int J A - Solid M 2004, 47:106-112.
25. Chen C.Q., Shi Y., Zhang Y.S., Zhu J., Yan Y.J. Size dependence of Young's modulus in ZnO nanowires. Phys Rev Lett 2006, 96.
26. Cuenot S., Fretigny C., Demoustier-Champagne S., Nysten B. Surface tension effect on the mechanical properties of nanomaterials measured by atomic force microscopy. Phys Rev B. 2004, 69.
27. Jing G.Y., Duan H.L., Sun X.M., Zhang Z.S., Xu J., Li Y.D., et al. Surface effects on elastic properties of silver nanowires: contact atomic-force microscopy. Phys Rev B 2006, 73.
28. Espinosa H.D., Agrawal R., Peng B., Gdoutos E.E. Elasticity size effects in ZnO nanowires - a combined experimental-computational approach. Nano Lett 2008, 8:3668-3674.
29. Streitz F.H., Cammarata R.C., Sieradzki K. Surface-stress effects on elastic properties .1. Thin metal-films. Phys Rev B. 1994, 49:10699-10706.
30. Miller R.E., Shenoy V.B. Size-dependent elastic properties of nanosized structural elements. Nanotechnology 2000, 11:139-147.
31. Lilley C.M., He J. Surface effect on the elastic behavior of static bending nanowires. Nano Lett 2008, 8:1798-1802.
32. Dingreville R., Qu J.M., Cherkaoui M. Surface free energy and its effect on the elastic behavior of nano-sized particles, wires and films. J Mech Phys Solids 2005, 53:1827-1854.
33. Zheng X.P., Cao Y.P., Li B., Feng X.Q., Wang G.F. Surface effects in various bending-based test methods for measuring the elastic property of nanowires. Nanotechnology 2010, 21.
34. Gaill K., McDowell M.T., Leach A.M. On the elastic modulus of metallic nanowires. Nano Lett 2008, 8:3613-3618.
35. Sumigawa T., Shishido T., Murakami T., Kitamura T. Interface crack initiation due to nano-scale stress concentration. Mat Sci Engng A - Struct 2010, 527:4796-4803.
36. Greer J.R., Nix W.D. Nanoscale gold pillars strengthened through dislocation starvation. Phys Rev B 2006, 73:245410.