Mechanical response of thin films with helical microstructures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 5, 1999, Pages 2172-2177

  Seto, M W ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644439351     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590887     Document Type: Article

References (3)

1. K. Robbie and M. J. Brett, J. Vac. Sci. Technol. A 13, 1032 (1995).
2. A. Lakhtakia, R. Messier, M. J. Brett, and K. Robbie, Innovations Mater. Res. 1, 165 (1996).
3. K. Robbie and M. J. Brett, J. Vac. Sci. Technol. A 15, 1460 (1997).