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Journal of Applied Physics

Volumn 110, Issue 4, 2011, Pages

Thermal conductivity and refractive index of hafnia-alumina nanolaminates

(2) Gabriel, Nicholas T a,b Talghader, Joseph J a

a University of Minnesota (United States)

b 3M COMPANY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA CONCENTRATION; CONTINUOUS FILMS; CRYOGENIC MEASUREMENT; CRYSTALLINITIES; DEGREE OF CRYSTALLINITY; DIFFUSE MISMATCH MODELS; DISORDERED SOLIDS; INTERFACE DENSITY; INTERFACE RESISTANCE; INTERFACE THERMAL RESISTANCE; NANO-LAMINATES; ROOM TEMPERATURE; THERMAL CONDUCTIVITY MODEL;

ATOMIC LAYER DEPOSITION; HAFNIUM OXIDES; HEAT RESISTANCE; LIGHT REFRACTION; REFRACTIVE INDEX; REFRACTOMETERS;

THERMAL CONDUCTIVITY OF SOLIDS;

EID: 80052422225 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3626462 Document Type: Article

Times cited : (29)

References (34)

1
- 50249185641
- (IEEE, Washington, DC)
- K. Mistry, C. Allen, C. Auth, B. Beattie, D. Bergstrom, M. Bost, M. Brazier, M. Buehler, A. Cappellani, R. Chau, C. Choi, G. Ding, K. Fischer, T. Ghani, R. Grover, W. Han, D. Hanken, M. Hattendorf, J. He, J. Hicks, R. Huessner, D. Ingerly, P. Jain, R. James, L. Jong, S. Joshi, C. Kenyon, K. Kuhn, K. Lee, H. Liu, J. Maiz, B. Mclntyre, P. Moon, J. Neirynck, S. Pae, C. Parker, D. Parsons, C. Prasad, L. Pipes, M. Prince, P. Ranade, T. Reynolds, J. Sandford, L. Shifren, J. Sebastian, J. Seiple, D. Simon, S. Sivakumar, P. Smith, C. Thomas, T. Troeger, P. Vandervoorn, S. Williams, and K. Zawadzki, in Technical Digest of IEEE International Electron Device Meeting (IEDM) (IEEE, Washington, DC, 2007) pp. 247-250.
- (2007) Technical Digest of IEEE International Electron Device Meeting (IEDM) , pp. 247-250
- Mistry, K.¹ Allen, C.² Auth, C.³ Beattie, B.⁴ Bergstrom, D.⁵ Bost, M.⁶ Brazier, M.⁷ Buehler, M.⁸ Cappellani, A.⁹ Chau, R.¹⁰ Choi, C.¹¹ Ding, G.¹² Fischer, K.¹³ Ghani, T.¹⁴ Grover, R.¹⁵ Han, W.¹⁶ Hanken, D.¹⁷ Hattendorf, M.¹⁸ He, J.¹⁹ Hicks, J.²⁰ more..

2
- 65549093343
- Front End Processes (ITRS)
- Front End Processes International Technology Roadmap for Semiconductors (ITRS, http://www.itrs.net/Links/2009ITRS/Home2009.htm, 2009).
- (2009) International Technology Roadmap for Semiconductors

3
- 70549091173
- 10.1109/LED.2009.2032937
- M. Panzer, M. Shandalov, J. Rowlette, Y. Oshima, Y. W. Chen, P. McIntyre, and K. Goodson, Electron Device Lett. 30, 1269 (2009). 10.1109/LED.2009.2032937
- (2009) Electron Device Lett. , vol.30 , pp. 1269
- Panzer, M.¹ Shandalov, M.² Rowlette, J.³ Oshima, Y.⁴ Chen, Y.W.⁵ McIntyre, P.⁶ Goodson, K.⁷

4
- 0037298039
- 10.1016/S0022-0248(02)02133-4
- D. M. Hausmann and R. G. Gordon, J. Cryst. Growth 249, 251 (2003). 10.1016/S0022-0248(02)02133-4
- (2003) J. Cryst. Growth , vol.249 , pp. 251
- Hausmann, D.M.¹ Gordon, R.G.²

5
- 72049111792
- 10.1016/j.tsf.2009.04.033
- J. C. Hackley and T. Gougousi, Thin Solid Films 517, 6576 (2009). 10.1016/j.tsf.2009.04.033
- (2009) Thin Solid Films , vol.517 , pp. 6576
- Hackley, J.C.¹ Gougousi, T.²

6
- 2442437008
- 10.1143/JJAP.43.1034
- S.-I. Zaitsu, S. Motokoshi, T. Jitsuno, M. Nakatsuka, and T. Yamanaka, Jpn. J. Appl. Phys. 43, 1034 (2004). 10.1143/JJAP.43.1034
- (2004) Jpn. J. Appl. Phys. , vol.43 , pp. 1034
- Zaitsu, S.-I.¹ Motokoshi, S.² Jitsuno, T.³ Nakatsuka, M.⁴ Yamanaka, T.⁵

7
- 1142310597
- 10.1126/science.1093711
- R. M. Costescu, D. G. Cahill, F. H. Fabreguette, Z. A. Sechrist, and S. M. George, Science 303, 989 (2004). 10.1126/science.1093711
- (2004) Science , vol.303 , pp. 989
- Costescu, R.M.¹ Cahill, D.G.² Fabreguette, F.H.³ Sechrist, Z.A.⁴ George, S.M.⁵

8
- 0035306385
- 10.1063/1.1353189
- T. Borca-Tasciuc, A. R. Kumar, and G. Chen, Rev. Sci. Instrum. 72, 2139 (2001). 10.1063/1.1353189
- (2001) Rev. Sci. Instrum. , vol.72 , pp. 2139
- Borca-Tasciuc, T.¹ Kumar, A.R.² Chen, G.³

9
- 77956698994
- 10.1038/nmat2752
- G. Pernot, M. Stoffel, I. Savic, F. Pezzoli, P. Chen, G. Savelli, A. Jacquot, J. Schumann, U. Denker, I. Mnch, C. Deneke, O. G. Schmidt, J. M. Rampnoux, S. Wang, M. Plissonnier, A. Rastelli, S. Dilhaire, and N. Mingo, Nat. Mater. 9, 491 (2010). 10.1038/nmat2752
- (2010) Nat. Mater. , vol.9 , pp. 491
- Pernot, G.¹ Stoffel, M.² Savic, I.³ Pezzoli, F.⁴ Chen, P.⁵ Savelli, G.⁶ Jacquot, A.⁷ Schumann, J.⁸ Denker, U.⁹ Mnch, I.¹⁰ Deneke, C.¹¹ Schmidt, O.G.¹² Rampnoux, J.M.¹³ Wang, S.¹⁴ Plissonnier, M.¹⁵ Rastelli, A.¹⁶ Dilhaire, S.¹⁷ Mingo, N.¹⁸

10
- 36549099049
- 10.1063/1.1141498
- D. G. Cahill, Rev. Sci. Instrum. 61, 802 (1990). 10.1063/1.1141498
- (1990) Rev. Sci. Instrum. , vol.61 , pp. 802
- Cahill, D.G.¹

11
- 0000856591
- 10.1103/PhysRevB.50.6077
- D. G. Cahill, M. Katiyar, and J. R. Abelson, Phys. Rev. B 50, 6077 (1994). 10.1103/PhysRevB.50.6077
- (1994) Phys. Rev. B , vol.50 , pp. 6077
- Cahill, D.G.¹ Katiyar, M.² Abelson, J.R.³

12
- 0001679381
- 10.1103/PhysRevB.52.253
- S. Lee, D. G. Cahill, and T. H. Allen, Phys. Rev. B 52, 253 (1995). 10.1103/PhysRevB.52.253
- (1995) Phys. Rev. B , vol.52 , pp. 253
- Lee, S.¹ Cahill, D.G.² Allen, T.H.³

13
- 0036799255
- 10.1021/cm020357x
- D. M. Hausmann, E. Kim, J. Becker, and R. G. Gordon, Chem. Mater. 14, 4350 (2002). 10.1021/cm020357x
- (2002) Chem. Mater. , vol.14 , pp. 4350
- Hausmann, D.M.¹ Kim, E.² Becker, J.³ Gordon, R.G.⁴

14
- 25144457034
- 10.1016/j.tsf.2005.05.050
- K. Kukli, T. Pilvi, M. Ritala, T. Sajavaara, J. Lu, and M. Leskel, Thin Solid Films 491, 328 (2005). 10.1016/j.tsf.2005.05.050
- (2005) Thin Solid Films , vol.491 , pp. 328
- Kukli, K.¹ Pilvi, T.² Ritala, M.³ Sajavaara, T.⁴ Lu, J.⁵ Leskel, M.⁶

15
- 0004273834
- (Wiley, New York, England)
- J. Rousseau, Basic Crystallography (Wiley, New York, England, 1998) p. 128.
- (1998) Basic Crystallography , pp. 128
- Rousseau, J.¹

16
- 0034160051
- 10.1016/S0304-3991(99)00164-3
- G. K. H. Pang, K. Z. Baba-Kishi, and A. Patel, Ultramicroscopy 81, 35 (2000). 10.1016/S0304-3991(99)00164-3
- (2000) Ultramicroscopy , vol.81 , pp. 35
- Pang, G.K.H.¹ Baba-Kishi, K.Z.² Patel, A.³

17
- 35949035159
- 10.1103/PhysRevB.20.3292
- D. E. Aspnes, J. B. Theeten, and F. Hottier, Phys. Rev. B 20, 3292 (1979). 10.1103/PhysRevB.20.3292
- (1979) Phys. Rev. B , vol.20 , pp. 3292
- Aspnes, D.E.¹ Theeten, J.B.² Hottier, F.³

18
- 0027682165
- G. Jellison, Jr., Thin Solid Films 234, 416 (1993).
- (1993) Thin Solid Films , vol.234 , pp. 416
- Jellison Jr., G.¹

19
- 84982143545
- CR72
- J. A. Woollam, B. D. Johs, C. M. Herzinger, J. N. Hilfiker, R. A. Synowicki, and C. L. Bungay, in Proceedings of SPIE, CR72, 3 (1999).
- (1999) Proceedings of SPIE , pp. 3
- Woollam, J.A.¹ Johs, B.D.² Herzinger, C.M.³ Hilfiker, J.N.⁴ Synowicki, R.A.⁵ Bungay, C.L.⁶

20
- 77949787203
- 10.1364/AO.49.001242
- N. T. Gabriel and J. J. Talghader, Appl. Opt. 49, 1242 (2010). 10.1364/AO.49.001242
- (2010) Appl. Opt. , vol.49 , pp. 1242
- Gabriel, N.T.¹ Talghader, J.J.²

21
- 0036808230
- 10.1063/1.1505652
- D. G. Cahill, Rev. Sci. Instrum. 73, 3701 (2002). 10.1063/1.1505652
- (2002) Rev. Sci. Instrum. , vol.73 , pp. 3701
- Cahill, D.G.¹

22
- 0001453806
- 10.1103/PhysRev.130.1743
- H. R. Shanks, P. D. Maycock, P. H. Sidles, and G. C. Danielson, Phys. Review 130, 1743 (1963). 10.1103/PhysRev.130.1743
- (1963) Phys. Review , vol.130 , pp. 1743
- Shanks, H.R.¹ Maycock, P.D.² Sidles, P.H.³ Danielson, G.C.⁴

23
- 36149005932
- A. 10.1103/PhysRev.134.A1058
- C. J. Glassbrenner and G. A. Slack, Phys. Rev. 134, A 1058 (1964). 10.1103/PhysRev.134.A1058
- (1964) Phys. Rev. , vol.134 , pp. 1058
- Glassbrenner, C.J.¹ Slack, G.A.²

24
- 0000370588
- 10.1016/0038-1101(67)90069-X
- P. Maycock, Solid-State Electron. 10, 161 (1967). 10.1016/0038-1101(67) 90069-X
- (1967) Solid-State Electron. , vol.10 , pp. 161
- Maycock, P.¹

25
- 0024685943
- 10.1016/0038-1098(89)90630-3
- D. G. Cahill and R. O. Pohl, Solid State Commun. 70, 927 (1989). 10.1016/0038-1098(89)90630-3
- (1989) Solid State Commun. , vol.70 , pp. 927
- Cahill, D.G.¹ Pohl, R.O.²

26
- 0001293162
- 10.1103/PhysRevB.46.6131
- D. G. Cahill, S. K. Watson, and R. O. Pohl, Phys. Rev. B 46, 6131 (1992). 10.1103/PhysRevB.46.6131
- (1992) Phys. Rev. B , vol.46 , pp. 6131
- Cahill, D.G.¹ Watson, S.K.² Pohl, R.O.³

27
- 51149220754
- 10.1103/RevModPhys.61.605
- E. T. Swartz and R. O. Pohl, Rev. Mod. Phys. 61, 605 (1989). 10.1103/RevModPhys.61.605
- (1989) Rev. Mod. Phys. , vol.61 , pp. 605
- Swartz, E.T.¹ Pohl, R.O.²

28
- 0003406742
- 8th ed. (Wiley, New York)
- For example, see C. Kittel and P. McEuen, Introduction to Solid State Physics, 8th ed. (Wiley, New York, 2005), p. 112.
- (2005) Introduction to Solid State Physics , pp. 112
- Kittel, C.¹ McEuen, P.²

29
- 0033901956
- 10.1016/S0040-6090(99)00690-2
- M. Alvisi, M. Di Giulio, S. G. Marrone, M. R. Perrone, M. L. Protopapa, A. Valentini, and L. Vasanelli, Thin Solid Films 358, 250 (2000). 10.1016/S0040-6090(99)00690-2
- (2000) Thin Solid Films , vol.358 , pp. 250
- Alvisi, M.¹ Di Giulio, M.² Marrone, S.G.³ Perrone, M.R.⁴ Protopapa, M.L.⁵ Valentini, A.⁶ Vasanelli, L.⁷

30
- 20044385139
- 10.1103/PhysRevB.71.115109
- M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, Phys. Rev. B 71, 115109 (2005). 10.1103/PhysRevB.71.115109
- (2005) Phys. Rev. B , vol.71 , pp. 115109
- Mero, M.¹ Liu, J.² Rudolph, W.³ Ristau, D.⁴ Starke, K.⁵

31
- 0037439322
- 10.1063/1.1524305
- D. G. Cahill, W. K. Ford, K. E. Goodson, G. D. Mahan, A. Majumdar, H. J. Maris, R. Merlin, and S. R. Phillpot, J. Appl. Phys. 93, 793 (2003). 10.1063/1.1524305
- (2003) J. Appl. Phys. , vol.93 , pp. 793
- Cahill, D.G.¹ Ford, W.K.² Goodson, K.E.³ Mahan, G.D.⁴ Majumdar, A.⁵ Maris, H.J.⁶ Merlin, R.⁷ Phillpot, S.R.⁸

32
- 80052393677
- t = 3.3 kms for hafnia..
- t = 3.3 Kms for Hafnia

33
- 0000881998
- 10.1103/PhysRevB.59.8105
- W. S. Capinski, H. J. Maris, T. Ruf, M. Cardona, K. Ploog, and D. S. Katzer, Phys. Rev. B 59, 8105 (1999). 10.1103/PhysRevB.59.8105
- (1999) Phys. Rev. B , vol.59 , pp. 8105
- Capinski, W.S.¹ Maris, H.J.² Ruf, T.³ Cardona, M.⁴ Ploog, K.⁵ Katzer, D.S.⁶

34
- 0000669214
- 10.1063/1.118755
- S. Lee, D. G. Cahill and R. Venkatasubramanian, Appl. Phys. Lett. 70, 2957 (1997). 10.1063/1.118755
- (1997) Appl. Phys. Lett. , vol.70 , pp. 2957
- Lee, S.¹ Cahill, D.G.² Venkatasubramanian, R.³

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