Laser damage properties of optical coatings with nanoscale layers grown by atomic layer deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 3, 2004, Pages 1034-1035

  Zaitsu, Sbin Ichi ^a,c   Motokoshi, Shinji ^b   Jitsuno, Takahisa ^a   Nakatsuka, Masahiro ^a   Yamanaka, Tatsuhiko ^a  

^a OSAKA UNIVERSITY   (Japan)

^b INSTITUTE FOR LASER TECHNOLOGY   (Japan)

^c KYUSHU UNIVERSITY   (Japan)

Author keywords

Atomic layer deposition; Laser induced damage; Nanostructure; Optical thin films; Oxide coatings

Indexed keywords

ALUMINA; CRYSTALLIZATION; LASER DAMAGE; LIGHT SCATTERING; NANOSTRUCTURED MATERIALS; REACTION KINETICS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; X RAY DIFFRACTION;

ATOMIC LAYER DEPOSITION; LASER-INDUCED DAMAGE; NANOSTRUCTURE; OPTICAL THIN FILMS; OXIDE COATINGS;

OPTICAL COATINGS;

EID: 2442437008     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.1034     Document Type: Article

References (5)

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