High-reflectivity two-axis vertical combdrive microscanners for sub-cellular scale confocal imaging applications

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006

Volumn , Issue , 2006, Pages 120-121

  Kumar, Karthik ^a   Hoshino, Kazunori ^a   Shin, Hyun Joon ^b   Richards Kortum, Rebecca ^b   Zhang, Xiaojing ^a  

^a The University of Texas at Austin   (United States)

^b Rice University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONFOCAL IMAGING APPLICATIONS; VERTICAL COMBDRIVE MICROSCANNERS;

COATINGS; IMAGING SYSTEMS; REFLECTION; SILICON WAFERS;

MIRRORS;

EID: 41549136146     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. D.L. Dickensheets, G.S. Kino, "Micromachined scanning confocal optical microscope," Opt. Lett. 21, 764-766 (1996).
2. H. Xie, Y. Pan, and G. K. Fedder, "Endoscopic optical coherence tomography with new MEMS mirror," Electr. Lett. 39, 1535-1536 (2003).
3. W. Piyawatanametha, P.R. Patterson, D. Hah, H. Toshiyoshi, and M.C. Wu, "Surface and bulk-micromachined two-dimentional scanner driven by angular vertical comb actuators", J. Micro. Electr. Mech. Sys. 14(6) 1329-1338, (2005)
4. U. Krishnamoorthy, D. Lee, O. Solgaard, "Self-aligned vertical electrostatic combdrives for micromirror actuation," J. Micro. Electr. Mech. Sys. 12, p458-464 (2003).
5. D. Lee, O. Solgaard, "Two-axis gimbaled microscanner in double SOI layers actuated by self-aligned vertical electrostatic combdrive," Proceedings of the Solid-State Sen. Act, p352-355 (Hilton Head, South Carolina (2004).