Surface-micromachined 2D optical scanners with optically flat single-crystalline silicon micromirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4293, Issue , 2001, Pages 46-53

  Su, G D J ^a   Patterson, P R ^a   Wu, M C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Bonding; Deep reactive ion etching; Honeycomb; Microelectromechanical devices; Micromirrors; Optical scanners; Silicon on insulator

Indexed keywords

ELECTROSTATIC ACTUATORS; MICROMACHINING; MIRRORS; NATURAL FREQUENCIES; POLYSILICON; REACTIVE ION ETCHING; SCANNING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS; SURFACE ROUGHNESS;

OPTICAL SCANNERS; OPTICALLY FLAT MICROMIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034865818     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.426942     Document Type: Conference Paper

References (23)

1. A high-speed low-voltage stress-induced micromachined 2*2 optical switch
2. Fully provisioned 112*112 micromechanical optical crossconnect with 35.8Tb/s demonstrated capacity
3. Two-dimensional optical scanner with large angular rotation realized by self-assembled micro-elevator
4. Optical scanners realized by surface-micromachined vertical torsion mirror
5. Electrostatic combdrive-acmated micromirrors for laser-beam scanning and positioning
6. Surface-micromachined microoptical elements and systems
7. Embedded micromechanical devices for the monolithic integration of MEMS with CMOS
8. Optical raster-scanning displays based on surface-micromachined polysilicon mirrors
9. Modeling, design, fabrication and measurement of a single layer polysilicon micromirror with initial curvature compensation
10. Designs to improve polysilicon micromirror surface topology
11. MEMS 2D scanning mirror for dynamic alignment in optical interconnect
12. Application of chemical-mechanical polishing to planarization of surface-micromachined devices
13. Torsional mirror with an electrostatically drive lever-mechanism
14. Stretched-film micromirrors for improved optical flatness
15. A novel asymmetric silicon micro-mirror for optical beam scanning display
16. Surface-micromachined 2D optical scanners with high-performance single-crystalline silicon micromirrors
17. Fabrication of microstructures using the liga process
18. Milli-scale polysilicon structures
19. A MEMS 2-D scanner with bonded single-crystalline honeycomb micromirror
20. Self-assembled microactuated XYZ stages for optical scanning and alignment
21. Fundamentals of photonics