Fabrication and characterization of polyaniline/PVA humidity microsensors

Sensors

Volumn 11, Issue 8, 2011, Pages 8143-8151

  Yang, Ming Zhi ^a   Dai, Ching Liang ^a   Lin, Wei Yi ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Humidity microsensors; MEMS; Polyaniline; Polyvinyl alcohol

Indexed keywords

ANILINE DERIVATIVE; METAL; OXIDE; POLYANILINE; POLYMER; POLYVINYL ALCOHOL;

ARTICLE; CHEMISTRY; ENVIRONMENTAL MONITORING; EQUIPMENT DESIGN; HUMIDITY; INSTRUMENTATION; METHODOLOGY; MICROELECTROMECHANICAL SYSTEM; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; SPECTROPHOTOMETRY; TEMPERATURE;

ANILINE COMPOUNDS; ENVIRONMENTAL MONITORING; EQUIPMENT DESIGN; HUMIDITY; METALS; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; MICROSCOPY, ELECTRON, SCANNING; OXIDES; POLYMERS; POLYVINYL ALCOHOL; SEMICONDUCTORS; SPECTROPHOTOMETRY; TEMPERATURE;

EID: 80052170512     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s110808143     Document Type: Article

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