High-performance capacitive humidity sensor with novel electrode and polyimide layer based on MEMS technology

Microsystem Technologies

Volumn 16, Issue 12, 2010, Pages 2017-2021

  Kim, Ji Hong ^a   Hong, Sung Min ^b   Moon, Byung Moo ^a   Kim, Kunnyun ^b  

^a Korea University   (South Korea)

^b Korea Electronic Technology Institute (KETI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTOM ELECTRODES; CAPACITANCE VALUES; CAPACITIVE HUMIDITY SENSORS; CAVITY STRUCTURE; CONTACT AREAS; EFFECT OF TEMPERATURE; ELECTRODE PASSIVATION; ERROR RATE; FAST RESPONSE TIME; HIGH SENSITIVITY; MEMS TECHNOLOGY; MOISTURE ABSORPTION; POLYIMIDE LAYERS; SENSING LAYERS; TEMPERATURE DEPENDENCE;

HYSTERESIS; MOISTURE; PASSIVATION; POLYIMIDES;

HUMIDITY SENSORS;

EID: 78049468412     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1139-0     Document Type: Article

References (11)

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