SCOPUS 정보 검색 플랫폼

Sensor Letters

Volumn 7, Issue 4, 2009, Pages 517-522

Microhotplate-based high-speed polyimide capacitive humidity sensors

(5) Lee, Myong Jin a Min, Nam Ki a Yoo, Kum Pyo a Kwak, Ki Young a Kwon, Kwang Ho a

a Korea University (South Korea)

Author keywords

Capacitive humidity sensor; Locally cured polyimide; Microhotplate

Indexed keywords

CURING; DIELECTRIC LOSSES; DIELECTRIC MATERIALS; FLUORINE COMPOUNDS; HUMIDITY SENSORS; POLYIMIDES; THIN FILMS;

ALTERNATIVE SOLUTIONS; CAPACITIVE HUMIDITY SENSORS; CONVENTIONAL STRUCTURES; FRONT-SIDE ETCHING; LOW DIELECTRIC LOSS; MICRO HOTPLATE; POLYIMIDE THIN FILMS; SENSOR MATERIALS;

CAPACITIVE SENSORS;

EID: 73449143490 PISSN: 1546198X EISSN: None Source Type: Journal
DOI: 10.1166/sl.2009.1102 Document Type: Article

Times cited : (6)

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