Miniature humidity micro-sensor based on organic conductive polymer - Poly(3,4-ethylenedioxythiophene)

Micro and Nano Letters

Volumn 4, Issue 2, 2009, Pages 84-87

  Li, L ^a   Vilela, F ^a   Forgie, J ^a   Skabara, P J ^a   Uttamchandani, D ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-GAPS; CONDUCTIVE POLYMER; CONSTANT TEMPERATURE; ETHYLENEDIOXYTHIOPHENES; HUMIDITY SENSING; MICRO-RESISTOR; MICROELECTROMECHANICAL SYSTEMS PROCESS; MULTI-USER; RELATIVE HUMIDITIES; ROOM TEMPERATURE; SATURATED SALT SOLUTION; SEALED CHAMBERS; THICK LAYERS;

CONDUCTING POLYMERS; CONDUCTIVE PLASTICS; HUMIDITY CONTROL; HUMIDITY SENSORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; MOISTURE; MOTOR BOATS; ORGANIC POLYMERS; POLYMERS; RESISTORS;

ATMOSPHERIC HUMIDITY;

NICKEL; POLY(3,4 ETHYLENEDIOXYTHIOPENE); POLYMER; UNCLASSIFIED DRUG;

ARTICLE; CHEMICAL STRUCTURE; CONDUCTOR; HUMIDITY MICRO SENSOR; MICROELECTROMECHANICAL SYSTEM; POLYMERIZATION; SCANNING ELECTRON MICROSCOPY; SENSOR;

EID: 68149161149     PISSN: None     EISSN: 17500443     Source Type: Journal    
DOI: 10.1049/mnl.2009.0005     Document Type: Article

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