A high-speed capacitive humidity sensor with on-chip thermal reset

IEEE Transactions on Electron Devices

Volumn 47, Issue 4, 2000, Pages 702-710

  Kang, Uksong ^a   Wise, Kensall D ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Capacitance transducers; Humidity transducers; Permittivity; Polymide films; Self test

Indexed keywords

CAPACITIVE HUMIDITY SENSORS; POLYSILICON HEATERS;

ATMOSPHERIC HUMIDITY; PERMITTIVITY; PLASTIC FILMS; POLYIMIDES; SENSORS; TRANSDUCERS;

THIN FILM DEVICES;

EID: 0033886159     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.830983     Document Type: Article

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