A micromachined resistive-type humidity sensor with a composite material as sensitive film

Sensors and Actuators, B: Chemical

Volumn 113, Issue 2, 2006, Pages 837-842

  Su, Pi Guey ^a   Ho, Chao Jen ^b   Sun, Yi Lu ^c   Chen, I Cherng ^b  

^a CHUNG CHOU INSTITUTE OF TECHNOLOGY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^c NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Composite material; Humidity microsensor; MEMS; Sensing properties

Indexed keywords

COATED COMPOSITE FILMS; HUMIDITY MICROSENSORS; LOGARITHMIC IMPEDANCE; SENSING PROPERTIES;

ADSORPTION; COMPOSITE MATERIALS; DESORPTION; ELECTROCHEMICAL ELECTRODES; HUMIDITY CONTROL; MICROELECTROMECHANICAL DEVICES; THERMAL EFFECTS; THICK FILM DEVICES;

MICROSENSORS;

EID: 31844441140     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.03.109     Document Type: Article

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