Polypyrrole porous micro humidity sensor integrated with a ring oscillator circuit on chip

Sensors (Switzerland)

Volumn 10, Issue 11, 2010, Pages 10095-10104

  Yang, Ming Zhi ^a   Dai, Ching Liang ^a   Lu, De Hao ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

CMOS MEMS; Humidity sensors; Polypyrrole; Ring oscillator circuits

Indexed keywords

CAPACITANCE VARIATION; CHEMICAL POLYMERIZATION; CMOS-MEMS; COMPLIMENTARY METAL OXIDE SEMICONDUCTORS; HUMIDITY SENSOR CHIPS; INTERDIGITAL ELECTRODE; OSCILLATION FREQUENCY; RING OSCILLATOR CIRCUITS;

CAPACITANCE; CAPACITORS; CMOS INTEGRATED CIRCUITS; MOS DEVICES; POLYPYRROLES; VAPORS; WET ETCHING;

HUMIDITY SENSORS;

POLYMER; POLYPYRROLE; PYRROLE DERIVATIVE;

ARTICLE; CHEMISTRY; EQUIPMENT DESIGN; HUMIDITY; INSTRUMENTATION; METHODOLOGY; MICROELECTROMECHANICAL SYSTEM;

EQUIPMENT DESIGN; HUMIDITY; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; POLYMERS; PYRROLES;

EID: 84871100332     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s101110095     Document Type: Article

References (12)

1. Fang, Z.; Zhao, Z.; Wu, Y.; Zhang B.; Wang, Y.Z. Integrated temperature and humidity sensor based MEMS. In Proceedings of 2004 IEEE International Conference Information Acquisition, Hefei, China, 2004; pp. 84-87.
2. Lee, M.J.; Min, N.K.; Yoo, K.P.; Kwak, K.Y.; Kwon, K.H. Microhotplate-based high-speed polyimide capacitive humidity sensors. Sen. Lett. 2009, 7, 517-522.
3. Miyoshi, Y.; Miyajima, K.; Saito, H.; Kudo, H.; Takeuchi, T.; Karube, I.; Mitsubayashi, K. Flexible humidity sensor in a sandwich configuration with a hydrophilic porous membrane. Sens. Actuat. B 2009, 142, 28-32.
4. Li, L.; Vilela, F.; Forgie, J.; Skabara, P.J.; Uttamchandani, D. Miniature humidity micro-sensor based on organic conductive polymer-Poly (3,4-ethylenedioxythiophene). Micro Nano Lett. 2009, 4, 84-87.
5. Juhász, L.; Mizsei, J. Humidity sensor structures with thin film porous alumina for on-chip integration. Thin Solid Film 2009, 517, 6198-6201.
6. Chen, L.T.; Lee, C.Y.; Cheng, W.H. MEMS-based humidity sensor with integrated temperature compensation mechanism. Sens. Actuat. A. 2008, 147, 522-528.
7. Dai, C.L.; Lu, D.H. Fabrication of a micro humidity sensor with polypyrrole using the CMOS process. In Proceedings of IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Xiamen, China, 2010; pp. 115-118.
8. Hajimiri, A.; Limotyrakis, S.; Lee, T.H. Jitter and phase noise in ring oscillators. IEEE J. Solid-State Circuit. 1999, 34, 790-804.
9. Kang, S.M.; Leblebici, Y. Digital Integrated Circuits; McGraw-Hill: New York, NY, USA, 1996.
10. Geng, L.; Zhao, Y.; Huang, X.; Wang, S.; Zhang, S.; Huang, W.; Wu, S. The preparation and gas sensitivity study of polypyrrole/zinc oxide. Synth. Metal. 2006, 156, 1078-1082.
11. Geng, W.; Li, N.; Li, X.; Wang, R.; Tu, J.; Zhang, T. Effect of polymerization time on the humidity sensing properties of polypyrrole. Sens. Actuat. B 2007, 125, 114-119.
12. Dai, C.L. A capacitive humidity sensor integrated with micro heater and ring oscillator circuit fabricated by CMOS-MEMS technique. Sens. Actuat. B 2007, 122, 375-380.