Miniaturised multi-MEMS sensor development

Microelectronics Reliability

Volumn 49, Issue 6, 2009, Pages 621-626

  Hautefeuille, Mathieu ^a   O'Flynn, Brendan ^a   Peters, Frank ^a,b   O'Mahony, Conor ^a  

^a UNIVERSITY COLLEGE CORK   (Ireland)

^b UNIVERSITY COLLEGE CORK   (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

BULK MICROMACHINING TECHNOLOGIES; CHARACTERISATION; CORROSION MONITORS; DISCRETE COMPONENTS; ENVIRONMENTAL CONDITIONS; ENVIRONMENTAL MONITORING SYSTEMS; ENVIRONMENTAL PARAMETERS; FORCED CONVECTIVE HEAT TRANSFERS; GAS-FLOW VELOCITIES; LOW FLOWS; MEASURAND; MEMS SENSORS; POWER CONSUMPTION; SENSING PLATFORMS; SENSOR SYSTEMS; SILICON SUBSTRATES; SPACE CONSUMPTION; TEMPERATURE AND HUMIDITY SENSORS; TYNDALL;

AERODYNAMICS; CORROSION; FLOW OF GASES; FLOW VELOCITY; GAS METERS; HUMIDITY CONTROL; MEMS; MICROELECTROMECHANICAL DEVICES; MOISTURE; SENSORS;

WIRELESS SENSOR NETWORKS;

EID: 67349111681     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2009.02.017     Document Type: Article

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