Novel atmospheric pressure inductively coupled micro plasma source using floating wire electrode

Japanese Journal of Applied Physics

Volumn 50, Issue 8 PART 2, 2011, Pages

  Kumagai, Shinya ^a   Matsuyama, Hiroki ^a   Yokoyama, Yoshihiro ^a   Hori, Masaru ^b   Sasaki, Minoru ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA COILS; CU ELECTRODE; GAS CHANNELS; GAS FLOW CHANNEL; GLASS WINDOWS; INDUCTIVELY-COUPLED; MICRO-PLASMAS; OPTICAL COUPLINGS; OPTICAL EMISSIONS; PLASMA REGION; POWER SOURCES; SLIT APERTURES; U-SHAPED; VERY HIGH FREQUENCY POWER; WIRE ELECTRODE; WIRED CONNECTION;

ATMOSPHERIC PRESSURE; ELECTROMAGNETIC INDUCTION; FLOW OF GASES; INTERNET PROTOCOLS; LIGHT EMISSION; PLASMAS;

WIRE;

EID: 80051968839     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.08JA02     Document Type: Conference Paper

References (32)

1. M. Iwasaki, H. Inui, Y. Matsudaira, H. Kano, N. Yoshida, M. Ito, and M. Hori: Appl. Phys. Lett. 92 (2008) 081503.
2. L. Jia, N. Sakai, M. Watanabe, and E. Hotta: Denki Gakkai Ronbunshi A 130 (2010) 573 [in Japanese].
3. T. Ideno and T. Ichiki: Thin Solid Films 506-507 (2006) 235.
4. Y. Shimizu, A. C. Bose, D. Mariotti, T. Sasaki, K. Kirihara, T. Suzuki, K. Terashima, and N. Koshizaki: Jpn. J. Appl. Phys. 45 (2006) 8228.
5. R. Bussiahn, R. Brandenburg, T. Gerling, E. Kindel, H. Lange, N. Lembke, K.-D. Weltmann, Th. von Woedtke, and T. Kocher: Appl. Phys. Lett. 96 (2010) 143701.
6. A. Shashurin, M. Keidar, S. Bronnikov, R. A. Jurjus, and M. A. Stepp: Appl. Phys. Lett. 93 (2008) 181501.
7. H. M. L. Tan, H. Fukuda, T. Akagi, and T. Ichiki: Thin Solid Films 515 (2007) 5172.
8. H. Ito, H. Kano, and M. Hori: Appl. Phys. Express 1 (2008) 106001.
9. S. Takahashi, S. Takashima, K. Yamakawa, S. Den, H. Kano, K. Takeda, and M. Hori: J. Appl. Phys. 106 (2009) 053306.
10. P. Carazzetti, Ph. Renaud, and H. Shea: Sens. Actuators A 154 (2009) 275.
11. H. Akatsuka: Denki Gakkai Ronbunshi A 130 (2010) 892 [in Japanese].
12. K. Shigeta, Y. Nagata, T. Iwai, H. Miyahara, and A. Okino: Denki Gakkai Ronbunshi A 130 (2010) 955 [in Japanese].
13. T. Ichiki, T. Koidesawa, and Y. Horiike: Plasma Sources Sci. Technol. 12 (2003) S16.
14. M. R. Webb, F. J. Andrade, and G. M. Hieftje: J. Anal. At. Spectrom. 22 (2007) 775.
15. M. R. Webb and G. M. Hieftje: Anal. Chem. 81 (2009) 862.
16. G. Jenkins, J. Franzke, and A. Manz: Lab Chip 5 (2005) 711.
17. J. A. C. Broekaert: Nature 455 (2008) 1185.
18. M. Kumai, K. Nakayama, Y. Furusho, T. Yamamoto, and Y. Takamura: Bunseki Kagaku 58 (2009) 561 [in Japanese].
19. G. Ohba, H. Miyahara, M. Watanabe, E. Hotta, and A. Okino: Bunseki Kagaku 55 (2006) 555 [in Japansese].
20. N. Saito, J. Tsunokawa, T. Nakagama, and K. Uchiyama: Bunseki Kagaku 56 (2007) 729 [in Japansese].
21. M. Miclea, M. Okruss, K. Kunze, N. Ahlman, and J. Franzke: Anal. Bioanal. Chem. 388 (2007) 1565.
22. R. Guchardi and P. C. Hauser: J. Chromatogr. A 1033 (2004) 333.
23. T. Ichiki, R. Taura, and Y. Horiike: J. Appl. Phys. 95 (2004) 35.
24. T. Ito and K. Terashima: Appl. Phys. Lett. 80 (2002) 2648.
25. S. Kiriu, H. Miyazoe, F. Takamine, M. Sai, J. H. Choi, T. Tomai, and K. Terashima: Appl. Phys. Lett. 94 (2009) 191502.
26. H. Miyazoe, M. Sai, S. Stauss, and K. Terashima: J. Vac. Sci. Technol. A 27 (2009) 9.
27. S. Tajima, M. Matsumori, S. Nakatsuka, S. Tsuchiya, and T. Ichiki: J. Appl. Phys. 108 (2010) 083302.
28. T. Ohta and M. Ito: Denki Gakkai Ronbunshi A 130 (2010) 972 [in Japanese].
29. T. Ohta, M. Ito, Y. Tachibana, S. Taneda, S. Takashima, M. Hori, H. Kano, and S. Den: Appl. Phys. Lett. 90 (2007) 251502.
30. H. B. Michaelson: J. Appl. Phys. 48 (1977) 4729.
31. J. Hopwood, F. Iza, S. Coy, and D. B. Fenner: J. Phys. D 38 (2005) 1698.
32. M. Sasaki, T. Hosono, and S. Kumagai: Proc. IEEE/LEOS Int. Conf. Optical MEMS and Nanophotonics, 2010, p. 39.