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Volumn 130, Issue 10, 2010, Pages 955-962

Trace elemental analysis technologies using atmospheric plasma sources

Author keywords

Atmospheric plasma; Elemental analysis; Glow discharge; Inductively coupled plasma; Micro plasma; Microwave induced plasma

Indexed keywords

ARGON; CHEMICAL ANALYSIS; ENVIRONMENTAL TECHNOLOGY; GLOW DISCHARGES; INDUCTIVELY COUPLED PLASMA; IONIZATION; IONIZATION OF GASES; IONIZATION POTENTIAL; MASS SPECTROMETRY; PLASMA SOURCES; SEMICONDUCTOR DEVICE MANUFACTURE; SPECTROMETRY; TRACE ANALYSIS;

EID: 78649495573     PISSN: 03854205     EISSN: 13475533     Source Type: Journal    
DOI: 10.1541/ieejfms.130.955     Document Type: Article
Times cited : (3)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.