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Volumn 92, Issue 8, 2008, Pages

Nonequilibrium atmospheric pressure plasma with ultrahigh electron density and high performance for glass surface cleaning

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CARRIER CONCENTRATION; CONTACT ANGLE; GLASS; OPTICAL EMISSION SPECTROSCOPY; SURFACE CLEANING;

GLASS SURFACE CLEANING; OXYGEN RADICAL CONCENTRATION;

PLASMAS;

EID: 40049111835 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2885084 Document Type: Article

Times cited : (125)

References (11)

1
- 34547838393
- JAPLD8 0021-4922 10.1143/JJAP.46.L540.
- M. Iwasaki, K. Takeda, M. Ito, T. Yara, T. Uehara, and M. Hori, Jpn. J. Appl. Phys., Part 2 JAPLD8 0021-4922 10.1143/JJAP.46.L540 46, L540 (2007).
- (2007) Jpn. J. Appl. Phys., Part 2 , vol.46 , pp. 540
- Iwasaki, M.¹ Takeda, K.² Ito, M.³ Yara, T.⁴ Uehara, T.⁵ Hori, M.⁶

2
- 1842810095
- JAPNDE 0021-4922 10.1143/JJAP.43.424.
- A. Matsushita, M. Nagai, K. Yamakawa, M. Hiramatsu, A. Sakai, M. Hori, T. Goto, and S. Zaima, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 10.1143/JJAP.43.424 43, 424 (2004).
- (2004) Jpn. J. Appl. Phys., Part 1 , vol.43 , pp. 424
- Matsushita, A.¹ Nagai, M.² Yamakawa, K.³ Hiramatsu, M.⁴ Sakai, A.⁵ Hori, M.⁶ Goto, T.⁷ Zaima, S.⁸

3
- 4043067044
- APPLAB 0003-6951 10.1063/1.1775885.
- K. Yamakawa, M. Hori, T. Goto, S. Den, T. Katagiri, and H. Kano, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1775885 85, 549 (2004).
- (2004) Appl. Phys. Lett. , vol.85 , pp. 549
- Yamakawa, K.¹ Hori, M.² Goto, T.³ Den, S.⁴ Katagiri, T.⁵ Kano, H.⁶

4
- 33751116285
- JAPIAU 0021-8979 10.1063/1.2372736.
- M. Iwasaki, M. Ito, T. Uehara, M. Nakamura, and M. Hori, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2372736 100, 093304 (2006).
- (2006) J. Appl. Phys. , vol.100 , pp. 093304
- Iwasaki, M.¹ Ito, M.² Uehara, T.³ Nakamura, M.⁴ Hori, M.⁵

5
- 79956018335
- APPLAB 0003-6951 10.1063/1.1470695.
- T. Ito and K. Terashima, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.1470695 80, 2854 (2004).
- (2004) Appl. Phys. Lett. , vol.80 , pp. 2854
- Ito, T.¹ Terashima, K.²

6
- 0001083964
- JAPIAU 0021-8979 10.1063/1.1323754.
- J. Park, I. Henins, H. W. Herrmann, and G. S. Selwyn, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1323754 89, 15 (2001).
- (2001) J. Appl. Phys. , vol.89 , pp. 15
- Park, J.¹ Henins, I.² Herrmann, H.W.³ Selwyn, G.S.⁴

7
- 6344240852
- JAPNDE 0021-4922 10.1143/JJAP.43.5540.
- S. Koike, T. Sakamoto, H. Kobori, H. Matsuura, and H. Akatsuka, Jpn. J. Appl. Phys., Part 1 JAPNDE 0021-4922 10.1143/JJAP.43.5540 43, 5540 (2004).
- (2004) Jpn. J. Appl. Phys., Part 1 , vol.43 , pp. 5540
- Koike, S.¹ Sakamoto, T.² Kobori, H.³ Matsuura, H.⁴ Akatsuka, H.⁵

8
- 0001376970
- APPLAB 0003-6951 10.1063/1.125497.
- S. Takashima, M. Hori, T. Goto, A. Kono, M. Ito, and K. Yoneda, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.125497 75, 3929 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 3929
- Takashima, S.¹ Hori, M.² Goto, T.³ Kono, A.⁴ Ito, M.⁵ Yoneda, K.⁶

9
- 40049085920
- Ph.D. thesis, Nagoya University.
- S. Takashima, Ph.D. thesis, Nagoya University, 2000.
- (2000)
- Takashima, S.¹

10
- 0032768770
- JCPBAN 0021-7689.
- V. Naudet, S. Abid, and C. E. Paillard, J. Chim. Phys. Phys.-Chim. Biol. JCPBAN 0021-7689 96, 1123 (1999).
- (1999) J. Chim. Phys. Phys.-Chim. Biol. , vol.96 , pp. 1123
- Naudet, V.¹ Abid, S.² Paillard, C.E.³

11
- 0001417398
- JCPSA6 0021-9606 10.1063/1.458972.
- H. Hippler, R. Rahn, and J. Troe, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.458972 93, 6560 (1990).
- (1990) J. Chem. Phys. , vol.93 , pp. 6560
- Hippler, H.¹ Rahn, R.² Troe, J.³

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