Optical emission spectroscopy measurement of processing plasmas

IEEJ Transactions on Fundamentals and Materials

Volumn 130, Issue 10, 2010, Pages 892-898

  Akatsuka, Hiroshi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Actinometry; Collisional radiative model; OES; Plasma spectroscopy; Rotational temperature; Vibrational temperature

Indexed keywords

ELECTRIC DISCHARGES; GAS DISCHARGE TUBES; LIGHT EMISSION; MOLECULES; OPTICAL EMISSION SPECTROSCOPY; PLASMA THEORY;

ACTINOMETRY; COLLISIONAL RADIATIVE MODEL; PLASMA SPECTROSCOPY; ROTATIONAL TEMPERATURE; VIBRATIONAL TEMPERATURE;

COLLISIONAL PLASMAS;

EID: 78649518735     PISSN: 03854205     EISSN: 13475533     Source Type: Journal    
DOI: 10.1541/ieejfms.130.892     Document Type: Article

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